| Presentation | 2019-11-07 Nitrogen doping to ZnO films in a catalytic reaction assisted chemical vapor deposition Ryuta Iba, Hiroki Kambayashi, Yuki Adachi, Koichiro Oishi, Hironori Katagiri, Kanji Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The large bandgap and large exciton binding energy of ZnO have recently stimulated intensive research into optoelectronic device applications, such as light-emitting diodes and laser diodes in the ultraviolet region. We previously developed a new chemical vapor deposition method for ZnO film growth using a catalytic reaction over Pt-nanoparticles between hydrogen and oxygen. ZnO films grown on a-plane sapphire substrates using this method exhibited excellent optical and electronic properties. In order to fabricate ZnO-based light-emitting diodes and laser diodes, preparation of p-type ZnO films is required. In the present study, we have attempted nitrogen doping of ZnO films by decomposition of NO gas using a heated Ir wire during film growth. The amount of nitrogen incorporated in the film and its bonding structure were evaluated using secondary ion mass spectrometry and X-ray photoelectron spectroscopy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | catalytic reaction / high-temperature H2O beam / Ir hot-wire / nitrogen doping |
| Paper # | CPM2019-47 |
| Date of Issue | 2019-10-31 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/11/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Fukui univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nitrogen doping to ZnO films in a catalytic reaction assisted chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | catalytic reaction |
| Keyword(2) | high-temperature H2O beam |
| Keyword(3) | Ir hot-wire |
| Keyword(4) | nitrogen doping |
| 1st Author's Name | Ryuta Iba |
| 1st Author's Affiliation | Nagaoka Uvibersity of technology(NUT) |
| 2nd Author's Name | Hiroki Kambayashi |
| 2nd Author's Affiliation | Nagaoka Uvibersity of technology(NUT) |
| 3rd Author's Name | Yuki Adachi |
| 3rd Author's Affiliation | Nagaoka Uvibersity of technology(NUT) |
| 4th Author's Name | Koichiro Oishi |
| 4th Author's Affiliation | National Institute of Technology, Nagaoka College(NITNC) |
| 5th Author's Name | Hironori Katagiri |
| 5th Author's Affiliation | National Institute of Technology, Nagaoka College(NITNC) |
| 6th Author's Name | Kanji Yasui |
| 6th Author's Affiliation | Nagaoka Uvibersity of technology(NUT) |
| Date | 2019-11-07 |
| Paper # | CPM2019-47 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-271 |
| Page | pp.pp.15-19(CPM), |
| #Pages | 5 |
| Date of Issue | 2019-10-31 (CPM) |