| Presentation | 2019-11-07 Annealing effects on the properties of nitrogen doped DLC films Hiroya Osanai, Kazuki Nakamura, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki, Maki Suemitsu, Hideki Nakazawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have prepared nitrogen doped diamond-like carbon (N-DLC) films by plasma-enhanced chemical vapor deposition using H2 as a dilution gas and investigated the effects of post-annealing in a vacuum on the film properties. We found that optical bandgap slightly increased after post-annealing at 235 to 270°C, suggesting that the density of defect levels in bandgap decreased. On the other hand, it was found that the optical bandgap decreased after post-annealing at 420 to 490°C. At these temperatures, the amount of bound hydrogen in the films tended to decrease, whereas sp2C=C bonds increased and their clustering was enhanced. We examined the current-voltage characteristics of N-DLC/p-type Si heterojunctions and found that the heterojunction annealed at 490°C exhibited the highest rectification ratio. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diamond-like carbon / Plasma-enhanced chemical vapor deposition / Nitrogen / Post-annealing |
| Paper # | CPM2019-46 |
| Date of Issue | 2019-10-31 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/11/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Fukui univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Annealing effects on the properties of nitrogen doped DLC films |
| Sub Title (in English) | |
| Keyword(1) | Diamond-like carbon |
| Keyword(2) | Plasma-enhanced chemical vapor deposition |
| Keyword(3) | Nitrogen |
| Keyword(4) | Post-annealing |
| 1st Author's Name | Hiroya Osanai |
| 1st Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 2nd Author's Name | Kazuki Nakamura |
| 2nd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 3rd Author's Name | Haruto Koriyama |
| 3rd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 4th Author's Name | Yasuyuki Kobayashi |
| 4th Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 5th Author's Name | Yoshiharu Enta |
| 5th Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 6th Author's Name | Yushi Suzuki |
| 6th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 7th Author's Name | Maki Suemitsu |
| 7th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 8th Author's Name | Hideki Nakazawa |
| 8th Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| Date | 2019-11-07 |
| Paper # | CPM2019-46 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-271 |
| Page | pp.pp.9-14(CPM), |
| #Pages | 6 |
| Date of Issue | 2019-10-31 (CPM) |