| Presentation | 2019-11-07 Study on Cu orientation control on ultra-thin TaWN film Mayumi B. Takeyama, Masaru Sato, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2019-45 |
| Date of Issue | 2019-10-31 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/11/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Fukui univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on Cu orientation control on ultra-thin TaWN film |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Mayumi B. Takeyama |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Technol.) |
| 2nd Author's Name | Masaru Sato |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Technol.) |
| Date | 2019-11-07 |
| Paper # | CPM2019-45 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-271 |
| Page | pp.pp.5-8(CPM), |
| #Pages | 4 |
| Date of Issue | 2019-10-31 (CPM) |