| Presentation | 2019-11-07 [Invited Talk] Metal oxide film growth by a catalytic reaction-assisted chemical vapor deposition Kanji Yasui, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Author reports a new CVD method for thin film growth of metal oxides using a reaction between organometallic compounds and high-energy H2O produced by a Pt-catalyzed H2-O2 reaction. The ZnO film properties such as crystallinity, electrical and optical properties are reported. In addition, improvement of the electron mobility and optical emission property by the addition of N2O gas is also reported. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Catalytic reaction / Chemical vapor deposition / Metal-oxide thin film |
| Paper # | CPM2019-48 |
| Date of Issue | 2019-10-31 (CPM) |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2019/11/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Fukui univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Metal oxide film growth by a catalytic reaction-assisted chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | Catalytic reaction |
| Keyword(2) | Chemical vapor deposition |
| Keyword(3) | Metal-oxide thin film |
| 1st Author's Name | Kanji Yasui |
| 1st Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol.) |
| Date | 2019-11-07 |
| Paper # | CPM2019-48 |
| Volume (vol) | vol.119 |
| Number (no) | CPM-271 |
| Page | pp.pp.21-26(CPM), |
| #Pages | 6 |
| Date of Issue | 2019-10-31 (CPM) |