| Presentation | 2019-11-21 Investigation of flat thin film growth conditions in ALD growth of ZnO Ryo Yamamoto, Hiroto Kano, Atsushi Nakamura, Wataru Inami, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2019-33,CPM2019-52,LQE2019-76 |
| Date of Issue | 2019-11-14 (ED, CPM, LQE) |
| Conference Information | |
| Committee | CPM / LQE / ED |
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| Conference Date | 2019/11/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka Univ. (Hamamatsu) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Nitride Semiconductor Devices, Materials, Related Technologies |
| Chair | Mayumi Takeyama(Kitami Inst. of Tech.) / Hiroshi Aruga(Mitsubishi Electric) / Michihiko Suhara(TMU) |
| Vice Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hiroshi Yasaka(Tohoku Univ.) / Hiroki Fujishiro(Tokyo Univ. of Science) |
| Secretary | Yuichi Nakamura(Hirosaki Univ.) / Hiroshi Yasaka(Furukawa Electric Industries) / Hiroki Fujishiro(Osaka Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Tomoaki Terasako(Ehime Univ.) / Fumihiko Hirose(Yamagata Univ.) / Fumito Nakajima(NTT) / Junji Kotani(Fjitsu Lab.) / Takuya Tsutsumi(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Investigation of flat thin film growth conditions in ALD growth of ZnO |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Ryo Yamamoto |
| 1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 2nd Author's Name | Hiroto Kano |
| 2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 3rd Author's Name | Atsushi Nakamura |
| 3rd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 4th Author's Name | Wataru Inami |
| 4th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| Date | 2019-11-21 |
| Paper # | ED2019-33,CPM2019-52,LQE2019-76 |
| Volume (vol) | vol.119 |
| Number (no) | ED-302,CPM-303,LQE-304 |
| Page | pp.pp.1-4(ED), pp.1-4(CPM), pp.1-4(LQE), |
| #Pages | 4 |
| Date of Issue | 2019-11-14 (ED, CPM, LQE) |