| Presentation | 2019-11-21 Characteristic evaluation of field emission cathode coated with liquid gallium Yuta Takafuji, Yoichiro Neo, Hidenori Mimura, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Since the field was discovered by Hata et al. That a liquid metal thin film was coated on the tip of a field emission cathode, the electric field strength required for tailor cone formation was lower than the electric field required for field emission (FE), resulting in stable FE. Studies have been reported. Both Li (2.9eV) and Ga (4.2eV), which have very different work functions, have a significant increase in FE current exceeding 1mA, and the FE process is very interesting. In these reports, the formation of a liquid metal electron source has been achieved by cleaning the surface by flushing under an ultra-high vacuum and then depositing a thin liquid metal thin film by a controlled evaporation method. When practical application is considered, including a chip forming part and a transport system in the electron gun part is a major obstacle. In this report, we found a method to form a liquid metal electron source in situ without changing the configuration of the electron gun part of the current electron beam microscope by a simple and inexpensive method, and evaluated their characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | field emission / field emission cathode coated with liquid / Ga |
| Paper # | ED2019-63 |
| Date of Issue | 2019-11-14 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2019/11/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Michihiko Suhara(TMU) |
| Vice Chair | Hiroki Fujishiro(Tokyo Univ. of Science) |
| Secretary | Hiroki Fujishiro(Saga Univ.) |
| Assistant | Junji Kotani(Fjitsu Lab.) / Takuya Tsutsumi(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristic evaluation of field emission cathode coated with liquid gallium |
| Sub Title (in English) | |
| Keyword(1) | field emission |
| Keyword(2) | field emission cathode coated with liquid |
| Keyword(3) | Ga |
| 1st Author's Name | Yuta Takafuji |
| 1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 2nd Author's Name | Yoichiro Neo |
| 2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 3rd Author's Name | Hidenori Mimura |
| 3rd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| Date | 2019-11-21 |
| Paper # | ED2019-63 |
| Volume (vol) | vol.119 |
| Number (no) | ED-305 |
| Page | pp.pp.17-20(ED), |
| #Pages | 4 |
| Date of Issue | 2019-11-14 (ED) |