| Presentation | 2019-11-15 Analysis of databases used for hot spot test cases Hiroki Ogura, Hidekazu Takahashi, Sinpei Sato, Atsushi Takahashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | With the miniaturization of semiconductor circuit patterns, the importance of photolithography has increased. In the state-of-the-art process, design rules are established to obtain fine and dense circuit patterns. However, there are places in the layout that are likely to cause defects called hot spots due to manufacturing variations. If a hot spot exists in the layout, modify the layout to eliminate the hot spot. Lithography simulation is generally used to eliminate hot spots. Layout modification using simulation is time consuming and requires a great deal of cost to eliminate one hot spot. For this reason, attention has been paid to a method that efficiently eliminates the huge number of hot spots on the layout. In the machine learning-based hot spot detection method, feature quantity, machine learning model selection and learning data are important for accurate detection. In terms of what, when the reliability of the learning data is low, even if the correctness of the detection result in machine learning is correct, there may be factors other than the feature selection and the performance of the selected learning model. The evaluation may not be performed correctly. This paper analyzes ICCAD 2012 benchmark data, which is a frequently used database. As a result, it was confirmed that ICCAD 2012 benchmark data had similar data trends between training data and test data, but there was no data diversity. From these facts, we have concluded that there are insufficient elements as learning data and that a better data set should be used. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hotspot / ICCAD 2012 benchmark data |
| Paper # | VLD2019-52,DC2019-76 |
| Date of Issue | 2019-11-06 (VLD, DC) |
| Conference Information | |
| Committee | VLD / DC / CPSY / RECONF / ICD / IE / IPSJ-SLDM / IPSJ-EMB / IPSJ-ARC |
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| Conference Date | 2019/11/13(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ehime Prefecture Gender Equality Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2019 -New Field of VLSI Design- |
| Chair | Nozomu Togawa(Waseda Univ.) / Satoshi Fukumoto(Tokyo Metropolitan Univ.) / Hidetsugu Irie(Univ. of Tokyo) / Yuichiro Shibata(Nagasaki Univ.) / Makoto Nagata(Kobe Univ.) / Hideaki Kimata(NTT) / Yutaka Tamiya(Fujitsu Lab.) / / Hiroshi Inoue(Kyushu Univ.) |
| Vice Chair | Daisuke Fukuda(Fujitsu Labs.) / Hiroshi Takahashi(Ehime Univ.) / Michihiro Koibuchi(NII) / Kota Nakajima(Fujitsu Lab.) / Kentaro Sano(RIKEN) / Yoshiki Yamaguchi(Tsukuba Univ.) / Masafumi Takahashi(Toshiba-memory) / Kazuya Kodama(NII) / Keita Takahashi(Nagoya Univ.) |
| Secretary | Daisuke Fukuda(Univ. of Aizu) / Hiroshi Takahashi(Hitachi) / Michihiro Koibuchi(Nihon Univ.) / Kota Nakajima(Chiba Univ.) / Kentaro Sano(Nagoya Inst. of Tech.) / Yoshiki Yamaguchi(Hokkaido Univ.) / Masafumi Takahashi(Hiroshima City Univ.) / Kazuya Kodama(e-trees.Japan) / Keita Takahashi(Tohoku Univ.) / (Socionext) / (NTT) / (NHK) |
| Assistant | Kazuki Ikeda(Hitachi) / / Eiji Arima(Univ. of Tokyo) / Shugo Ogawa(Hitachi) / Yuuki Kobayashi(NEC) / Hiroki Nakahara(Tokyo Inst. of Tech.) / Tetsuya Hirose(Osaka Univ.) / Koji Nii(Floadia) / Takeshi Kuboki(Kyushu Univ.) / Kyohei Unno(KDDI Research) / Norishige Fukushima(Nagoya Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on VLSI Design Technologies / Technical Committee on Dependable Computing / Technical Committee on Computer Systems / Technical Committee on Reconfigurable Systems / Technical Committee on Integrated Circuits and Devices / Technical Committee on Image Engineering / Special Interest Group on System and LSI Design Methodology / Special Interest Group on Embedded Systems / Special Interest Group on System Architecture |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Analysis of databases used for hot spot test cases |
| Sub Title (in English) | |
| Keyword(1) | Hotspot |
| Keyword(2) | ICCAD 2012 benchmark data |
| 1st Author's Name | Hiroki Ogura |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Hidekazu Takahashi |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 3rd Author's Name | Sinpei Sato |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 4th Author's Name | Atsushi Takahashi |
| 4th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2019-11-15 |
| Paper # | VLD2019-52,DC2019-76 |
| Volume (vol) | vol.119 |
| Number (no) | VLD-282,DC-283 |
| Page | pp.pp.191-196(VLD), pp.191-196(DC), |
| #Pages | 6 |
| Date of Issue | 2019-11-06 (VLD, DC) |