| Presentation | 2019-11-07 Design of computer-generated hologram for discrimination of concave and convex fine defects on dielectric surface Jun-ichiro Sugisaka, Takashi Yasui, Koichi Hirayama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Small defects on a flat surface can be measured from the phase information of the reflected light. However, discrimination of the fine convex and concave defects that are smaller than the illumination wavelength is difficult because of the complicated relation of the phase information and the defect structure. In this study, we design a computer-generated hologram to discriminate fine convex and concave defects on a dielectric flat surface. This system does not need any interferometer and mechanical scanning. The defect identification can be easily achieved by observing the spot intensity after passing the scattered wave from the sample through this hologram. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Inverse problem / Scattering theory / Optical measurement / Computer-generated hologram |
| Paper # | EMT2019-47 |
| Date of Issue | 2019-10-31 (EMT) |
| Conference Information | |
| Committee | EMT / IEE-EMT |
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| Conference Date | 2019/11/7(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hotel Syunkeiya |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Electromagnetic Theory, etc. |
| Chair | Koichi Hirayama(Kitami Inst. of Tech.) / Keiji Goto(National Defense Academy) |
| Vice Chair | Hiroyuki Deguchi(Doshisha Univ.) |
| Secretary | Hiroyuki Deguchi(Fukuoka Inst.of Tech.) / (Tokyo Metropolitan Univ.) |
| Assistant | Junichiro Sugisaka(Kitami Inst. of Tech.) / Tsuyoshi Matsuoka(Kyushu Sangyo Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Electromagnetic Theory / Technical Meeting on Electromagnetic Theory |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Design of computer-generated hologram for discrimination of concave and convex fine defects on dielectric surface |
| Sub Title (in English) | |
| Keyword(1) | Inverse problem |
| Keyword(2) | Scattering theory |
| Keyword(3) | Optical measurement |
| Keyword(4) | Computer-generated hologram |
| 1st Author's Name | Jun-ichiro Sugisaka |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| 2nd Author's Name | Takashi Yasui |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| 3rd Author's Name | Koichi Hirayama |
| 3rd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. Tech.) |
| Date | 2019-11-07 |
| Paper # | EMT2019-47 |
| Volume (vol) | vol.119 |
| Number (no) | EMT-272 |
| Page | pp.pp.39-44(EMT), |
| #Pages | 6 |
| Date of Issue | 2019-10-31 (EMT) |