| Presentation | 2019-10-24 [Invited Talk] Random nanostructure formation and electric readout for nano-artifact metrics Seiya Kasai, Renpeng Lu, Katsumi Shimizu, Xiang Yin, Yosuke Ueba, Mikio Ishikawa, Mitsuru Kitamura, Morihisa Hoga, Makoto Naruse, Tsutomu Matsumoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We introduce a basic concept of nano-artifact metrics, expected to be a highly secure authentication technique using nano-scale random structures. Recent development of the basic technologies for the nano-artifact metrics including formation of two-dimensional random nanostructure using a resist collapse and a novel electric readout of the formed nanostructures. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Artifact metrics / Random nanostructure / Resist collapse / Electric readout / Si MOSFET |
| Paper # | SDM2019-62 |
| Date of Issue | 2019-10-16 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2019/10/23(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Random nanostructure formation and electric readout for nano-artifact metrics |
| Sub Title (in English) | |
| Keyword(1) | Artifact metrics |
| Keyword(2) | Random nanostructure |
| Keyword(3) | Resist collapse |
| Keyword(4) | Electric readout |
| Keyword(5) | Si MOSFET |
| 1st Author's Name | Seiya Kasai |
| 1st Author's Affiliation | Hokkaido University(Hokkaido Univ.) |
| 2nd Author's Name | Renpeng Lu |
| 2nd Author's Affiliation | Hokkaido University(Hokkaido Univ.) |
| 3rd Author's Name | Katsumi Shimizu |
| 3rd Author's Affiliation | Hokkaido University(Hokkaido Univ.) |
| 4th Author's Name | Xiang Yin |
| 4th Author's Affiliation | Hokkaido University(Hokkaido Univ.) |
| 5th Author's Name | Yosuke Ueba |
| 5th Author's Affiliation | Dai Nippon Printing(DNP) |
| 6th Author's Name | Mikio Ishikawa |
| 6th Author's Affiliation | Dai Nippon Printing(DNP) |
| 7th Author's Name | Mitsuru Kitamura |
| 7th Author's Affiliation | Dai Nippon Printing(DNP) |
| 8th Author's Name | Morihisa Hoga |
| 8th Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 9th Author's Name | Makoto Naruse |
| 9th Author's Affiliation | The University of Tokyo(Univ. of Tokyo) |
| 10th Author's Name | Tsutomu Matsumoto |
| 10th Author's Affiliation | Yokohama National University(YNU) |
| Date | 2019-10-24 |
| Paper # | SDM2019-62 |
| Volume (vol) | vol.119 |
| Number (no) | SDM-239 |
| Page | pp.pp.45-50(SDM), |
| #Pages | 6 |
| Date of Issue | 2019-10-16 (SDM) |