| Presentation | 2019-11-15 Triple-Layered Ring Oscillators and Image Sensors Developed by Direct Bonding of SOI Wafers Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have studied on pixel-parallel three-dimensional (3D) integrated CMOS image sensors. We previously reported double-layered image sensors by direct bonding of silicon on insulator (SOI) layers with embedded Au electrodes, which confirmed pixel-parallel video images. We have newly designed the triple-layered ring oscillator and image sensor to demonstrate the concept of the multi-layered devices which improve the resolution and enhance the functionality. The developed triple-stacked wafers are confirmed to have no voids or separation of layers even after the removal of the handle layer, thereby demonstrating the feasibility of multi-layered imaging devices for the next-generation video systems. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | CMOS image sensor / 3D integration / ring oscillator / bonding / SOI / A/D converter |
| Paper # | ICD2019-38,IE2019-44 |
| Date of Issue | 2019-11-07 (ICD, IE) |
| Conference Information | |
| Committee | VLD / DC / CPSY / RECONF / ICD / IE / IPSJ-SLDM / IPSJ-EMB / IPSJ-ARC |
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| Conference Date | 2019/11/13(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ehime Prefecture Gender Equality Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2019 -New Field of VLSI Design- |
| Chair | Nozomu Togawa(Waseda Univ.) / Satoshi Fukumoto(Tokyo Metropolitan Univ.) / Hidetsugu Irie(Univ. of Tokyo) / Yuichiro Shibata(Nagasaki Univ.) / Makoto Nagata(Kobe Univ.) / Hideaki Kimata(NTT) / Yutaka Tamiya(Fujitsu Lab.) / / Hiroshi Inoue(Kyushu Univ.) |
| Vice Chair | Daisuke Fukuda(Fujitsu Labs.) / Hiroshi Takahashi(Ehime Univ.) / Michihiro Koibuchi(NII) / Kota Nakajima(Fujitsu Lab.) / Kentaro Sano(RIKEN) / Yoshiki Yamaguchi(Tsukuba Univ.) / Masafumi Takahashi(Toshiba-memory) / Kazuya Kodama(NII) / Keita Takahashi(Nagoya Univ.) |
| Secretary | Daisuke Fukuda(Univ. of Aizu) / Hiroshi Takahashi(Hitachi) / Michihiro Koibuchi(Nihon Univ.) / Kota Nakajima(Chiba Univ.) / Kentaro Sano(Nagoya Inst. of Tech.) / Yoshiki Yamaguchi(Hokkaido Univ.) / Masafumi Takahashi(Hiroshima City Univ.) / Kazuya Kodama(e-trees.Japan) / Keita Takahashi(Tohoku Univ.) / (Socionext) / (NTT) / (NHK) |
| Assistant | Kazuki Ikeda(Hitachi) / / Eiji Arima(Univ. of Tokyo) / Shugo Ogawa(Hitachi) / Yuuki Kobayashi(NEC) / Hiroki Nakahara(Tokyo Inst. of Tech.) / Tetsuya Hirose(Osaka Univ.) / Koji Nii(Floadia) / Takeshi Kuboki(Kyushu Univ.) / Kyohei Unno(KDDI Research) / Norishige Fukushima(Nagoya Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on VLSI Design Technologies / Technical Committee on Dependable Computing / Technical Committee on Computer Systems / Technical Committee on Reconfigurable Systems / Technical Committee on Integrated Circuits and Devices / Technical Committee on Image Engineering / Special Interest Group on System and LSI Design Methodology / Special Interest Group on Embedded Systems / Special Interest Group on System Architecture |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Triple-Layered Ring Oscillators and Image Sensors Developed by Direct Bonding of SOI Wafers |
| Sub Title (in English) | |
| Keyword(1) | CMOS image sensor |
| Keyword(2) | 3D integration |
| Keyword(3) | ring oscillator |
| Keyword(4) | bonding |
| Keyword(5) | SOI |
| Keyword(6) | A/D converter |
| 1st Author's Name | Masahide Goto |
| 1st Author's Affiliation | NHK STRL(NHK) |
| 2nd Author's Name | Yuki Honda |
| 2nd Author's Affiliation | NHK Engineering System(NHK-ES) |
| 3rd Author's Name | Toshihisa Watabe |
| 3rd Author's Affiliation | NHK STRL(NHK) |
| 4th Author's Name | Kei Hagiwara |
| 4th Author's Affiliation | NHK STRL(NHK) |
| 5th Author's Name | Masakazu Nanba |
| 5th Author's Affiliation | NHK STRL(NHK) |
| 6th Author's Name | Yoshinori Iguchi |
| 6th Author's Affiliation | NHK STRL(NHK) |
| 7th Author's Name | Takuya Saraya |
| 7th Author's Affiliation | The University of Tokyo(Univ. of Tokyo) |
| 8th Author's Name | Masaharu Kobayashi |
| 8th Author's Affiliation | The University of Tokyo(Univ. of Tokyo) |
| 9th Author's Name | Eiji Higurashi |
| 9th Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 10th Author's Name | Hiroshi Toshiyoshi |
| 10th Author's Affiliation | The University of Tokyo(Univ. of Tokyo) |
| 11th Author's Name | Toshiro Hiramoto |
| 11th Author's Affiliation | The University of Tokyo(Univ. of Tokyo) |
| Date | 2019-11-15 |
| Paper # | ICD2019-38,IE2019-44 |
| Volume (vol) | vol.119 |
| Number (no) | ICD-284,IE-285 |
| Page | pp.pp.45-49(ICD), pp.45-49(IE), |
| #Pages | 5 |
| Date of Issue | 2019-11-07 (ICD, IE) |