| 講演名 | 2019-10-09 Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application Wei Qiu(NICT), Hirotaka Terai(NICT), |
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| 抄録(和) | We have developed low-loss coplanar waveguide (CPW) resonators, which can be applied to many applications, such as superconducting quantum bits (qubits) and microwave kinetic inductance detectors. To realize low-loss superconducting resonators, we introduced a dc magnetron sputtering system with an ultra-low background pressure below 8 ?10-8 Pa. In this research, we characterize superconducting Nb films as a low-loss material for a CPW resonator. The Nb film properties, such as the film resistivity , superconducting transition temperature Tc, residual resistance ratio (RRR), film stress, and surface morphology have been studied. We also evaluated the internal loss by measuring the S11 and S21 parameters from CPW resonators made of Nb films. |
| 抄録(英) | We have developed low-loss coplanar waveguide (CPW) resonators, which can be applied to many applications, such as superconducting quantum bits (qubits) and microwave kinetic inductance detectors. To realize low-loss superconducting resonators, we introduced a dc magnetron sputtering system with an ultra-low background pressure below 8 ?10-8 Pa. In this research, we characterize superconducting Nb films as a low-loss material for a CPW resonator. The Nb film properties, such as the film resistivity , superconducting transition temperature Tc, residual resistance ratio (RRR), film stress, and surface morphology have been studied. We also evaluated the internal loss by measuring the S11 and S21 parameters from CPW resonators made of Nb films. |
| キーワード(和) | superconducting / microwave / kinetic inductance / Niobium / polycrystalline / sputtering / loss |
| キーワード(英) | superconducting / microwave / kinetic inductance / Niobium / polycrystalline / sputtering / loss |
| 資料番号 | SCE2019-23 |
| 発行日 | 2019-10-02 (SCE) |
| 研究会情報 | |
| 研究会 | SCE |
|---|---|
| 開催期間 | 2019/10/9(から2日開催) |
| 開催地（和） | 東北大学・電気通信研究所 |
| 開催地（英） | |
| テーマ（和） | 検出基盤技術及び応用、一般 |
| テーマ（英） | |
| 委員長氏名（和） | 神代 暁(産総研) |
| 委員長氏名（英） | Satoshi Kohjiro(AIST) |
| 副委員長氏名（和） | |
| 副委員長氏名（英） | |
| 幹事氏名（和） | 竹内 尚輝(横浜国大) / 三木 茂人(NICT) |
| 幹事氏名（英） | Naoki Takeuchi(Yokohama National Univ.) / Shigehito Miki(NICT) |
| 幹事補佐氏名（和） | 赤池 宏之(大同大) |
| 幹事補佐氏名（英） | Hiroyuki Akaike(Daido Univ.) |
| 講演論文情報詳細 | |
| 申込み研究会 | Technical Committee on Superconductive Electronics |
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| 本文の言語 | ENG |
| タイトル（和） | |
| サブタイトル（和） | |
| タイトル（英） | Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application |
| サブタイトル（和） | |
| キーワード(1)（和/英） | superconducting / superconducting |
| キーワード(2)（和/英） | microwave / microwave |
| キーワード(3)（和/英） | kinetic inductance / kinetic inductance |
| キーワード(4)（和/英） | Niobium / Niobium |
| キーワード(5)（和/英） | polycrystalline / polycrystalline |
| キーワード(6)（和/英） | sputtering / sputtering |
| キーワード(7)（和/英） | loss / loss |
| 第 1 著者 氏名（和/英） | Wei Qiu / Wei Qiu |
| 第 1 著者 所属（和/英） | National Institute of Information and Communications Technology(略称：NICT) National Institute of Information and Communications Technology(略称：NICT) |
| 第 2 著者 氏名（和/英） | Hirotaka Terai / Hirotaka Terai |
| 第 2 著者 所属（和/英） | National Institute of Information and Communications Technology(略称：NICT) National Institute of Information and Communications Technology(略称：NICT) |
| 発表年月日 | 2019-10-09 |
| 資料番号 | SCE2019-23 |
| 巻番号（vol） | vol.119 |
| 号番号（no） | SCE-219 |
| ページ範囲 | pp.7-10(SCE), |
| ページ数 | 4 |
| 発行日 | 2019-10-02 (SCE) |