| Presentation | 2019-08-06 Multi-axial force tactile sensor using piezoresistor Kentaro Noda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we propose a skin-type tactile sensor which can measure a micro size texture of an object by scanning its surface. The sensor was composed of two layers with different stiffness, the surface layer with highly stiff and bumpy surface, and the inner layer with low stiffness. Silicon piezoresitive cantilevers formed in three orthogonal directions which can measure both normal and shear directional forces were used to measure the deformation of this skin-like structure. The highly sensitive silicon piezoresistor enabled a human like texture measurement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Piezoresistor / Multi force sensor / MEMS |
| Paper # | ED2019-28 |
| Date of Issue | 2019-07-30 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2019/8/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Sensors, MEMS, General |
| Chair | Michihiko Suhara(TMU) |
| Vice Chair | Hiroki Fujishiro(Tokyo Univ. of Science) |
| Secretary | Hiroki Fujishiro(Saga Univ.) |
| Assistant | Junji Kotani(Fjitsu Lab.) / Takuya Tsutsumi(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Multi-axial force tactile sensor using piezoresistor |
| Sub Title (in English) | |
| Keyword(1) | Piezoresistor |
| Keyword(2) | Multi force sensor |
| Keyword(3) | MEMS |
| 1st Author's Name | Kentaro Noda |
| 1st Author's Affiliation | Toyama Prefectural University(Toyama Pref. Univ.) |
| Date | 2019-08-06 |
| Paper # | ED2019-28 |
| Volume (vol) | vol.119 |
| Number (no) | ED-160 |
| Page | pp.pp.5-8(ED), |
| #Pages | 4 |
| Date of Issue | 2019-07-30 (ED) |