| Presentation | 2019-08-08 [Invited Talk] Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques Yuki Furubayashi, Takashi Oshima, Yudai Kamada, Atsushi Isobe, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A fully integrated MEMS(Micro Electro Mechanical Systems) accelerometer with extremely low noise (22ng/√Hz) and sufficiently low power (17mW) was developed for emerging applications such as next-generation oil and gas exploration and infrastructure monitoring. It achieved 11x FoM and 1/9 noise level among state-of-the-art low-noise low-power MEMS accelerometers by applying a unique MEMS structure and noise reduction in the digital domain based on awareness of unfamiliar noise mechanisms. In this paper, as an application enabled by the noise performance, an example which has applied this sensor to the water-leakage detection is explained. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Accelerometer / MEMS / Low power / Low noise / Oil and gas exploration / Infrastructure monitoring |
| Paper # | SDM2019-43,ICD2019-8 |
| Date of Issue | 2019-07-31 (SDM, ICD) |
| Conference Information | |
| Committee | SDM / ICD / ITE-IST |
|---|---|
| Conference Date | 2019/8/7(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ., Graduate School /Faculty of Information Science and |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications |
| Chair | Takahiro Shinada(Tohoku Univ.) / Makoto Nagata(Kobe Univ.) / 秋田 純一(金沢大)) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) / Masafumi Takahashi(Toshiba-memory) / 廣瀬 裕(パナソニック) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) / Masafumi Takahashi(TOSHIBA MEMORY) / 廣瀬 裕(Tohoku Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) / Tetsuya Hirose(Osaka Univ.) / Koji Nii(Floadia) / Takeshi Kuboki(Kyushu Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Integrated Circuits and Devices / Technical Group on Information Sensing Technologies |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Low-Noise Low-Power MEMS Accelerometer with Digital Noise-Reduction Techniques |
| Sub Title (in English) | |
| Keyword(1) | Accelerometer |
| Keyword(2) | MEMS |
| Keyword(3) | Low power |
| Keyword(4) | Low noise |
| Keyword(5) | Oil and gas exploration |
| Keyword(6) | Infrastructure monitoring |
| 1st Author's Name | Yuki Furubayashi |
| 1st Author's Affiliation | Hitachi, Ltd.(Hitachi, Ltd.) |
| 2nd Author's Name | Takashi Oshima |
| 2nd Author's Affiliation | Hitachi, Ltd.(Hitachi, Ltd.) |
| 3rd Author's Name | Yudai Kamada |
| 3rd Author's Affiliation | Hitachi, Ltd.(Hitachi, Ltd.) |
| 4th Author's Name | Atsushi Isobe |
| 4th Author's Affiliation | Hitachi, Ltd.(Hitachi, Ltd.) |
| Date | 2019-08-08 |
| Paper # | SDM2019-43,ICD2019-8 |
| Volume (vol) | vol.119 |
| Number (no) | SDM-161,ICD-162 |
| Page | pp.pp.35-40(SDM), pp.35-40(ICD), |
| #Pages | 6 |
| Date of Issue | 2019-07-31 (SDM, ICD) |