Presentation 2019-08-09
Effect of Vsub and Positive Charge in Buried Oxide on Super Steep SS “PN Body-Tied SOI-FET”
Wataru Yabuki, Jiro Ida, Takayuki Mori, Koichiro Ishibashi, Yasuo Arai,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this study, We report the effect of the substrate bias (Vsub) and the positive charge (Qox) in the buried oxide (BOX) on super steep subthreshold slope (SS) “PN Body-Tied (PNBT) SOI-FET” proposed in our laboratory. The Qox in the BOX was evaluated with the specific test device. Removing the effect of the Qox and realizing the super steep SS, the necessity of Vsub, especially on P-channel, was systematically confirmed with measurements and simulations. It was founded out that the positive feedback by PNBT contributes to making the barrier height for reducing the leakage current and realizing the super steep SS, although the difference of the static barrier height is small only with Vsub and the Qox. We also propose modification on PNBT structure for realizing CMOS without Vsub bias.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SOI-FET / Steep Subthreshold Slope / Oxide Charge
Paper # SDM2019-51,ICD2019-16
Date of Issue 2019-07-31 (SDM, ICD)

Conference Information
Committee SDM / ICD / ITE-IST
Conference Date 2019/8/7(3days)
Place (in Japanese) (See Japanese page)
Place (in English) Hokkaido Univ., Graduate School /Faculty of Information Science and
Topics (in Japanese) (See Japanese page)
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications
Chair Takahiro Shinada(Tohoku Univ.) / Makoto Nagata(Kobe Univ.) / 秋田 純一(金沢大))
Vice Chair Hiroshige Hirano(TowerJazz Panasonic) / Masafumi Takahashi(Toshiba-memory) / 廣瀬 裕(パナソニック)
Secretary Hiroshige Hirano(Shizuoka Univ.) / Masafumi Takahashi(TOSHIBA MEMORY) / 廣瀬 裕(Tohoku Univ.)
Assistant Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) / Tetsuya Hirose(Osaka Univ.) / Koji Nii(Floadia) / Takeshi Kuboki(Kyushu Univ.)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Integrated Circuits and Devices / Technical Group on Information Sensing Technologies
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of Vsub and Positive Charge in Buried Oxide on Super Steep SS “PN Body-Tied SOI-FET”
Sub Title (in English)
Keyword(1) SOI-FET
Keyword(2) Steep Subthreshold Slope
Keyword(3) Oxide Charge
1st Author's Name Wataru Yabuki
1st Author's Affiliation Kanazawa Institute of Technology(KIT)
2nd Author's Name Jiro Ida
2nd Author's Affiliation Kanazawa Institute of Technology(KIT)
3rd Author's Name Takayuki Mori
3rd Author's Affiliation Kanazawa Institute of Technology(KIT)
4th Author's Name Koichiro Ishibashi
4th Author's Affiliation University of Electro-Communications(UEC)
5th Author's Name Yasuo Arai
5th Author's Affiliation High Energy Accelerator Research Organization(KEK)
Date 2019-08-09
Paper # SDM2019-51,ICD2019-16
Volume (vol) vol.119
Number (no) SDM-161,ICD-162
Page pp.pp.89-93(SDM), pp.89-93(ICD),
#Pages 5
Date of Issue 2019-07-31 (SDM, ICD)