| Presentation | 2019-06-21 [Invited Lecture] Necessity of 2D/3D nano metrology from the point of semiconductor devices Koji Usuda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2019-29 |
| Date of Issue | 2019-06-14 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2019/6/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Univ. VBL3F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] Necessity of 2D/3D nano metrology from the point of semiconductor devices |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Koji Usuda |
| 1st Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory Co.) |
| Date | 2019-06-21 |
| Paper # | SDM2019-29 |
| Volume (vol) | vol.119 |
| Number (no) | SDM-96 |
| Page | pp.pp.21-21(SDM), |
| #Pages | 1 |
| Date of Issue | 2019-06-14 (SDM) |