| Presentation | 2019-05-17 Nitriding by active screen plasma and its surface structure analysis Susumu Ichimura, Seigo Takashima, Ippei Tsuru, Daichi Ohkubo, Hideaki Matsuo, Mineo Goto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2019-20,CPM2019-11,SDM2019-18 |
| Date of Issue | 2019-05-09 (ED, CPM, SDM) |
| Conference Information | |
| Committee | SDM / ED / CPM |
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| Conference Date | 2019/5/16(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka Univ. (Hamamatsu) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Materials, Fabrication, and Characterization of Functional Devices, and Related Technology |
| Chair | Takahiro Shinada(Tohoku Univ.) / Kunio Tsuda(Toshiba) / Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) / Michihiko Suhara(TMU) / Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) / Michihiko Suhara(TOSHIBA MEMORY) / Mayumi Takeyama(NICT) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) / Tatsuya Iwata(TUT) / Junji Kotani(Fjitsu Lab.) / Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Electron Devices / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nitriding by active screen plasma and its surface structure analysis |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Susumu Ichimura |
| 1st Author's Affiliation | Nagoya Industries Promotion Corporation(Nagoya Industries Promotion Corporation) |
| 2nd Author's Name | Seigo Takashima |
| 2nd Author's Affiliation | Nagoya Industries Promotion Corporation(Nagoya Industries Promotion Corporation) |
| 3rd Author's Name | Ippei Tsuru |
| 3rd Author's Affiliation | Nakanihon-Ro Kogyo Co., Ltd.(Nakanihon-Ro Kogyo Co., Ltd.) |
| 4th Author's Name | Daichi Ohkubo |
| 4th Author's Affiliation | Nakanihon-Ro Kogyo Co., Ltd.(Nakanihon-Ro Kogyo Co., Ltd.) |
| 5th Author's Name | Hideaki Matsuo |
| 5th Author's Affiliation | Nakanihon-Ro Kogyo Co., Ltd.(Nakanihon-Ro Kogyo Co., Ltd.) |
| 6th Author's Name | Mineo Goto |
| 6th Author's Affiliation | Nakanihon-Ro Kogyo Co., Ltd.(Nakanihon-Ro Kogyo Co., Ltd.) |
| Date | 2019-05-17 |
| Paper # | ED2019-20,CPM2019-11,SDM2019-18 |
| Volume (vol) | vol.119 |
| Number (no) | ED-34,CPM-35,SDM-36 |
| Page | pp.pp.47-52(ED), pp.47-52(CPM), pp.47-52(SDM), |
| #Pages | 6 |
| Date of Issue | 2019-05-09 (ED, CPM, SDM) |