| Presentation | 2019-02-28 Fabrication of SnO2 film and device application by room temperature atomic layer deposition Shunsuke Saito, Keito Sogai, Kazuki Yoshida, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad Arima, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2018-108 |
| Date of Issue | 2019-02-21 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/2/28(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Young Researcher's Conference |
| Chair | Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of SnO2 film and device application by room temperature atomic layer deposition |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Shunsuke Saito |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 2nd Author's Name | Keito Sogai |
| 2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 3rd Author's Name | Kazuki Yoshida |
| 3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 4th Author's Name | Kensaku Kanomata |
| 4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 5th Author's Name | Masanori Miura |
| 5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 6th Author's Name | Bashir Ahmmad Arima |
| 6th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| 7th Author's Name | Fumihiko Hirose |
| 7th Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2019-02-28 |
| Paper # | CPM2018-108 |
| Volume (vol) | vol.118 |
| Number (no) | CPM-461 |
| Page | pp.pp.33-36(CPM), |
| #Pages | 4 |
| Date of Issue | 2019-02-21 (CPM) |