Presentation | 2019-02-28 Fabrication of SnO2 film and device application by room temperature atomic layer deposition Shunsuke Saito, Keito Sogai, Kazuki Yoshida, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad Arima, Fumihiko Hirose, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | CPM2018-108 |
Date of Issue | 2019-02-21 (CPM) |
Conference Information | |
Committee | CPM |
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Conference Date | 2019/2/28(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Young Researcher's Conference |
Chair | Fumihiko Hirose(Yamagata Univ.) |
Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) |
Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
Paper Information | |
Registration To | Technical Committee on Component Parts and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Fabrication of SnO2 film and device application by room temperature atomic layer deposition |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Shunsuke Saito |
1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
2nd Author's Name | Keito Sogai |
2nd Author's Affiliation | Yamagata University(Yamagata Univ.) |
3rd Author's Name | Kazuki Yoshida |
3rd Author's Affiliation | Yamagata University(Yamagata Univ.) |
4th Author's Name | Kensaku Kanomata |
4th Author's Affiliation | Yamagata University(Yamagata Univ.) |
5th Author's Name | Masanori Miura |
5th Author's Affiliation | Yamagata University(Yamagata Univ.) |
6th Author's Name | Bashir Ahmmad Arima |
6th Author's Affiliation | Yamagata University(Yamagata Univ.) |
7th Author's Name | Fumihiko Hirose |
7th Author's Affiliation | Yamagata University(Yamagata Univ.) |
Date | 2019-02-28 |
Paper # | CPM2018-108 |
Volume (vol) | vol.118 |
Number (no) | CPM-461 |
Page | pp.pp.33-36(CPM), |
#Pages | 4 |
Date of Issue | 2019-02-21 (CPM) |