| Presentation | 2019-02-28 Electrical characterization of metal-insulator-metal stacked structure using ZrNx thin film Hideki Kitada, Masaru Sato, Mayumi Takeyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The rectification function to prevent a multivalued function and the snaking current in two-terminal operation is necessary for the resistive random access memory (ReRAM) used for the nonvolatile memory (NVM). In the electrical characterization on metal-insulation film structure that uses the nitride zirconium nitride (ZrNx) thin film, it was clarified to generate a Schottky barrier of different height in the thin film interface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZrN / MIM / Schottky barrier / ReRAM |
| Paper # | CPM2018-111 |
| Date of Issue | 2019-02-21 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2019/2/28(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Young Researcher's Conference |
| Chair | Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Mayumi Takeyama(Toyohashi Univ. of Tech.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical characterization of metal-insulator-metal stacked structure using ZrNx thin film |
| Sub Title (in English) | |
| Keyword(1) | ZrN |
| Keyword(2) | MIM |
| Keyword(3) | Schottky barrier |
| Keyword(4) | ReRAM |
| 1st Author's Name | Hideki Kitada |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Institute) |
| 2nd Author's Name | Masaru Sato |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Institute) |
| 3rd Author's Name | Mayumi Takeyama |
| 3rd Author's Affiliation | Kitami Institute of Technology(Kitami Institute) |
| Date | 2019-02-28 |
| Paper # | CPM2018-111 |
| Volume (vol) | vol.118 |
| Number (no) | CPM-461 |
| Page | pp.pp.45-48(CPM), |
| #Pages | 4 |
| Date of Issue | 2019-02-21 (CPM) |