| Presentation | 2019-02-07 [Invited Talk] High-precision Dual Damascene Fabrication Technique Takashi Hayakawa, Makoto, Syuji Nozawa, Tatsuya Yamaguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
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| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2019/2/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Backend / Assembly and Related materials technology |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] High-precision Dual Damascene Fabrication Technique |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Takashi Hayakawa |
| 1st Author's Affiliation | TOKYO ELECTRON LIMITED(TEL) |
| 2nd Author's Name | Makoto |
| 2nd Author's Affiliation | TOKYO ELECTRON LIMITED(TEL) |
| 3rd Author's Name | Syuji Nozawa |
| 3rd Author's Affiliation | Tokyo Electron Technology Solutions Limited(TEL) |
| 4th Author's Name | Tatsuya Yamaguchi |
| 4th Author's Affiliation | Tokyo Electron Technology Solutions Limited(TEL) |
| Date | 2019-02-07 |
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| Volume (vol) | vol.118 |
| Number (no) | SDM-438 |
| Page | pp.pp.-(), |
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