Presentation | 2019-02-07 [Invited Talk] Grain-Boundary-Crystallinity Dependence of Mechanical Properties and EM Resistance of Electroplated Copper Interconnections Yifan Luo, Yutaro Nakoshi, Ryota Mizuno, Ken Suzuki, Hideo Miura, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2018-94 |
Date of Issue | 2019-01-31 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2019/2/7(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Backend / Assembly and Related materials technology |
Chair | Takahiro Shinada(Tohoku Univ.) |
Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
Secretary | Hiroshige Hirano(Shizuoka Univ.) |
Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | [Invited Talk] Grain-Boundary-Crystallinity Dependence of Mechanical Properties and EM Resistance of Electroplated Copper Interconnections |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Yifan Luo |
1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
2nd Author's Name | Yutaro Nakoshi |
2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
3rd Author's Name | Ryota Mizuno |
3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
4th Author's Name | Ken Suzuki |
4th Author's Affiliation | Tohoku University(Tohoku Univ.) |
5th Author's Name | Hideo Miura |
5th Author's Affiliation | Tohoku University(Tohoku Univ.) |
Date | 2019-02-07 |
Paper # | SDM2018-94 |
Volume (vol) | vol.118 |
Number (no) | SDM-438 |
Page | pp.pp.15-18(SDM), |
#Pages | 4 |
Date of Issue | 2019-01-31 (SDM) |