| Presentation | 2019-01-29 [Invited Talk] Assessment of Steep-Subthreshold Swing Behaviors in Ferroelectric Field-Effect Transistors Shinji Migita, Hiroyuki Ota, Akira Thorium, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Steep-subthreshold swing (steep-SS) behaviors are observable in recent ferroelectric-gate field-effect transistors (FE-FETs) many times, and those reports suggest that they are caused by the negative capacitance effect (NC-Effect). However, the definition and the criteria for the NC-effect are still unclear. Therefore, it is not easy to conclude that all of those results come from the NC-effect. In this work, we prepared FE-FETs that consist of the metal-ferroelectric-metal-insulator- semiconductor (MFMIS) gates stack structures with different area ratios between MIS and MFM capacitors. We observed that the steep-SS behavior becomes remarkable in the FE-FET with appropriate capacitance ratio. We think that this phenomena is explainable from the viewpoint of redistribution of voltage in the gate stack caused by the electronic charge emerged in the process of the polarization reversal in the ferroelectric capacitors. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | steep subthreshold swing / negative capacitance / ferroelectricity / HfO2 / transistor |
| Paper # | SDM2018-82 |
| Date of Issue | 2019-01-22 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2019/1/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Takahiro Shinada(Tohoku Univ.) |
| Vice Chair | Hiroshige Hirano(TowerJazz Panasonic) |
| Secretary | Hiroshige Hirano(Shizuoka Univ.) |
| Assistant | Takahiro Mori(AIST) / Nobuaki Kobayashi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Assessment of Steep-Subthreshold Swing Behaviors in Ferroelectric Field-Effect Transistors |
| Sub Title (in English) | |
| Keyword(1) | steep subthreshold swing |
| Keyword(2) | negative capacitance |
| Keyword(3) | ferroelectricity |
| Keyword(4) | HfO2 |
| Keyword(5) | transistor |
| 1st Author's Name | Shinji Migita |
| 1st Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 2nd Author's Name | Hiroyuki Ota |
| 2nd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 3rd Author's Name | Akira Thorium |
| 3rd Author's Affiliation | The University of Tokyo(U. Tokyo) |
| Date | 2019-01-29 |
| Paper # | SDM2018-82 |
| Volume (vol) | vol.118 |
| Number (no) | SDM-429 |
| Page | pp.pp.5-8(SDM), |
| #Pages | 4 |
| Date of Issue | 2019-01-22 (SDM) |