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Presentation |
2017-06-20 14:35
Direct Observation of Chemical Structure and Electrical Dipole at High-k/SiO2 Interface Using by XPS Measurements Nobuyuki Fujimura, Akio Ohta, Mitsuhisa Ikeda, Katsunori Makihara, Seiichi Miyazaki (Nagoya Univ.) |
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SDM2017-25 Link to ES Tech. Rep. Archives: SDM2017-25 |
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