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Presentation |
2016-04-08 16:50
Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure Taisei Harada, Futa Gakiya, Takuya Ashitomi, Tatsuya Okada, Takashi Noguchi (Univ. of the Ryukyus), Kanji Noda, Akira Suwa (GiGAPHOTON Inc.), Hiroshi Ikenoue (Kyusyu Univ.), Tetsuo Okuyama (TOYOBO Company, Limited) |
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SDM2016-10 OME2016-10 Link to ES Tech. Rep. Archives: SDM2016-10 OME2016-10 |
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