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Presentation 2015-11-26 10:30
Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma
Tsutomu Araki, Akira Buma, Nao Masuda, Yasushi Nanishi (Ritsumeikan Univ.), Masaya Oda, Toshimi Hitora (FLOSFIA)
PDF Download Link ED2015-68 CPM2015-103 LQE2015-100 Link to ES Tech. Rep. Archives: ED2015-68 CPM2015-103 LQE2015-100
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