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2015-11-26 10:30
Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma Tsutomu Araki, Akira Buma, Nao Masuda, Yasushi Nanishi (Ritsumeikan Univ.), Masaya Oda, Toshimi Hitora (FLOSFIA) |
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ED2015-68 CPM2015-103 LQE2015-100 Link to ES Tech. Rep. Archives: ED2015-68 CPM2015-103 LQE2015-100 |
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