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Presentation |
2015-11-27 10:25
Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source P.Pungboon Pansila, Kensaku Kanomata, Bashir Ahammad, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ) |
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ED2015-81 CPM2015-116 LQE2015-113 Link to ES Tech. Rep. Archives: ED2015-81 CPM2015-116 LQE2015-113 |
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