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| Presentation | 2015-08-25 10:55 [Invited Talk] Novel Single p+Poly-Si/Hf/SiON Gate Stack Technology on Silicon-on-Thin-Buried-Oxide (SOTB) for Ultra-Low Leakage Applications Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Yasuo Yamaguchi (Renesas Electronics Corp.), Nobuyuki Sugii (Hitachi), Tomoko Mizutani, Masaharu Kobayashi, Toshiro Hiramoto (UT) |
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| PDF Download Link |  SDM2015-67 ICD2015-36 Link to ES Tech. Rep. Archives: SDM2015-67 ICD2015-36 |
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