PDF Download Link |
Presentation |
2014-01-24 09:00
Electromagnetic Simulation of High Resistance Silicon Substrate by Helium ion Irradiation Yuki Yao, Takuichi Hirano, Ning Li, Kenichi Okada, Akira Matsuzawa, Jiro Hirokawa, Makoto Ando (Tokyo Inst. of Tech.), Takeshi Inoue, Akinori Masaoka, Hitoshi Sakane (SEI) |
PDF Download Link |
PN2013-61 OPE2013-175 LQE2013-161 EST2013-110 MWP2013-81 Link to ES Tech. Rep. Archives: OPE2013-175 LQE2013-161 EST2013-110 MWP2013-81 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
|