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2010-10-29 09:25
Estimation of nitride layer thickness and characterization of the interface between SiC and nitride layer prepared by direct nitridation Shinichiro Suzuki, Yusuke Murata, Mitsunori Henmi, Tomohiko Yamakami, Rinpei Hayashibe, Kiichi Kamimura (Shinshu Univ.) |
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CPM2010-100 Link to ES Tech. Rep. Archives: CPM2010-100 |
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