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Presentation |
2009-10-30 09:25
Lowering of the AZO film resisitivity by hydrogen radical annealing Yutaka Ohshima, Masami Tahara, Mohd Hanif (Nagaoka Univ. of Tech.), Hironori Katagiri, Kazuo Jinbo (Nagaoka National College of Tech.), Yuichiro Kuroki, Masasuke Takata, Kanji Yasui (Nagaoka Univ. of Tech.) |
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CPM2009-97 Link to ES Tech. Rep. Archives: CPM2009-97 |
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