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Presentation 2009-10-29 14:30
A study on Improvement of Thermal Stability for PtSi Alloying with Hf Utilizing Two-Step Silicidation Process
Jun Gao, Jumpei Ishikawa, Shun-ichiro Ohmi (Tokyo Inst. of Tech.)
PDF Download Link SDM2009-118 Link to ES Tech. Rep. Archives: SDM2009-118
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