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| Presentation | 2009-08-10 15:30 Fabrication of SiC MIS structure using direct nitridation layer as an interfacial layer Shinichiro Suzuki, Akira Sengoku, Takuma Tsuji, Mitsunori Henmi, Yusuke Murata, Tomohiko Yamakami, Rinpei Hayashibe, Kiichi Kamimura (Shinshu Univ.) |
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| PDF Download Link |  CPM2009-35 Link to ES Tech. Rep. Archives: CPM2009-35 |
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