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Presentation 2008-11-27 16:50
Low-pressure HVPE growth and characterization of AlN on period-trench-pattered substrate
Yusuke Katagiri, Kazuteru Okuura, Jiejun Wu, Hideto Miyake, Kazumasa Hiramatsu (Mie Univ.), Tetsuya Ezaki, Noriyuki Kuwano (Kyushu Univ.)
PDF Download Link ED2008-166 CPM2008-115 LQE2008-110 Link to ES Tech. Rep. Archives: ED2008-166 CPM2008-115 LQE2008-110
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