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Presentation 2008-04-11 13:15
Clarification of ITO/AlNiNd contact formation mechanism
Kazumasa Kawase, Tsukasa Motoya, Junji Tanimura (Mitsubishi Electric Corp.), Naoki Tsumura (メルコ・ディスプレイ・テクノロジ), Kensuke Nagayama (メルコ・ディスプレイ・テクノロジー), Nobuaki Ishiga (メルコ・ディスプレイ・テクノロジ), Kazunori Inoue (Mitsubishi Electric Corp.)
PDF Download Link SDM2008-8 OME2008-8 Link to ES Tech. Rep. Archives: SDM2008-8 OME2008-8
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