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Presentation 2006-10-06 16:50
Effects of ion damage reduction due to N2+ on InN film growth on Si substrate by ECR-MBE method
Tokuo Yodo, Teruya Shimada, Sumito Tagawa, Ryo Nishimoto, Shiro Hidaka, Keita Ishi, Hiroshi Segawa, Junichi Hirakawa, Yoshiyuki Harada (Osaka Inst.of Tech.)
PDF Download Link Link to ES Tech. Rep. Archives: ED2006-175 CPM2006-112 LQE2006-79
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