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Presentation 2006-10-06 16:00
Direct nitridation of SiC surface and characterization of nitride layer by XPS
Tetsuo Yamaguchi, Yoshiki Ishida, Chen Chen, Masataka Hagihara, Rinpei Hayashibe, Tomohiko Yamakami, Katsuya Abe, Kiichi Kamimura (Shinshu Univ.)
PDF Download Link Link to ES Tech. Rep. Archives: ED2006-173 CPM2006-110 LQE2006-77
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