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Presentation |
2006-10-06 16:00
Direct nitridation of SiC surface and characterization of nitride layer by XPS Tetsuo Yamaguchi, Yoshiki Ishida, Chen Chen, Masataka Hagihara, Rinpei Hayashibe, Tomohiko Yamakami, Katsuya Abe, Kiichi Kamimura (Shinshu Univ.) |
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Link to ES Tech. Rep. Archives: ED2006-173 CPM2006-110 LQE2006-77 |
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