Electronics-Silicon Devices and Materials(Date:2022/02/04)

Presentation
[Invited Talk] Superconducting Quantum Computers

Yutaka Tabuchi(RIKEN),  

[Date]2022-02-04
[Paper #]SDM2021-78
[Invited Talk] Advanced Damascene Integration with Self Assembled Monolayer (SAM)

Hiroyuki Nagai(TEL),  Mitsuaki Iwashita(TEL),  Yuki Kikuchi(TEL),  Kawasaki Hiroaki(TTCA),  Gyana Pattanaik(TTCA),  Keiichi Fujita(TKL),  Kazutoshi Iwai(TEA),  Hiroyuki Komatsu(JSR),  Yuuki Ozaki(JSR),  

[Date]2022-02-04
[Paper #]SDM2021-75
[Invited Talk] Printed Electronics using low-temperature catalyzed solution-processed SiO2

Takeo Minari(NIMS),  Qingqing Sun(Zhengzhou Univ.),  Lingying Li(NIMS),  Wanli Li(Jiangnan Univ.),  Xuying Liu(Zhengzhou Univ.),  

[Date]2022-02-04
[Paper #]SDM2021-76
[Invited Talk] Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films using lag-time method

Takeshi Momose(UTokyo),  Taewoong Kim(UTokyo),  Yubin Deng(UTokyo),  Momoko Deura(UTokyo),  Akira Matsuo(CANON ANELVA),  Nobuo Yamaguchi(CANON ANELVA),  Yukihiro Shimogaki(UTokyo),  

[Date]2022-02-04
[Paper #]SDM2021-74
[Invited Talk] 3D Integration Technology for Quantum Computer based on Diamond Spin Qubits

Ryoichi Ishihara(TUDelft),  Jeffrel Hermias(TUDelft),  Shuichang Yu(TUDelft),  King Y. Yu(TUDelft),  Ye Li(TUDelft),  Maurice van der Maas(TUDelft),  Salahuddin Nur(TUDelft),  Toshiki Iwai(Fujitsu),  Tetsuya Miyatake(Fujitsu),  Kenichi Kawaguchi(Fujitsu),  Yoshiyasu Doi(Fujitsu),  Shintaro Sato(Fujitsu),  

[Date]2022-02-04
[Paper #]SDM2021-79
[Invited Talk] 3D Sequential Process Integration for CMOS Image Sensor

Keiichi Nakazawa(Sony Semiconductor Solutions),  Junpei Yamamoto(Sony Semiconductor Solutions),  Nobutoshi Fujii(Sony Semiconductor Solutions),  Mutsuo Uehara(Sony Semiconductor Solutions),  Katsunori Hiramatsu(Sony Semiconductor Solutions),  Hideomi Kumano(Sony Semiconductor Solutions),  Shigetaka Mori(Sony Semiconductor Solutions),  Shintaro Okamoto(Sony Semiconductor Solutions),  Akito Shimizu(Sony Semiconductor Solutions),  Koichi Baba(Sony Semiconductor Solutions),  Hidetoshi Onuma(Sony Semiconductor Solutions),  Akira Matsumoto(Sony Semiconductor Solutions),  Koichiro Zaitsu(Sony Semiconductor Solutions),  Keiji Tanani(Sony Semiconductor Solutions),  Tomoyuki Hirano(Sony Semiconductor Solutions),  Hayato Iwamoto(Sony Semiconductor Solutions),  

[Date]2022-02-04
[Paper #]SDM2021-77