Electronics-Silicon Devices and Materials(Date:2012/10/18)

Presentation
表紙

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[Date]2012/10/18
[Paper #]
目次

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[Date]2012/10/18
[Paper #]
Chemical structures of compositional transition layer at SiO_2/Si(100) interface

Tomoyuki SUWA,  Akinobu TERAMOTO,  Takayuki MURO,  Toyohiko KINOSHITA,  Shigetoshi SUGAWA,  Takeo HATTORI,  Tadahiro OHMI,  

[Date]2012/10/18
[Paper #]SDM2012-89
AR-XPS and HAX-PES Studies on Chemical bonding states at SiO_2/SiC Interfaces

H. Okada,  A. Komatsu,  M. Watanabe,  Y. Izumi,  T. Muro,  K. Sawano,  H. Nohira,  

[Date]2012/10/18
[Paper #]SDM2012-90
Evaluation of crystalline phase in SiO_2 thin film using Grazing incidence X-ray diffraction

Kohki Nagata,  Takuya Yamaguchi,  Atsushi Ogura,  Tomoyuki Koganezawa,  Ichiro Hirosawa,  Tomoyuki Suwa,  Akinobu Teramoto,  Takeo Hattori,  Tadahiro Ohmi,  

[Date]2012/10/18
[Paper #]SDM2012-91
Noise Performance of Accumulation MOSFETs

Philippe GAUBERT,  Akinobu TERAMOTO,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2012/10/18
[Paper #]SDM2012-92
Low Temperature PECVD of High Quality Silicon Nitride for Gate Spacer

Yukihisa NAKAO,  Akinobu TERAMOTO,  Rihito KURODA,  Tomoyuki SUWA,  Hiroaki TANAKA,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2012/10/18
[Paper #]SDM2012-93
Science-Based New Silicon LSI Technologies : Improvement of Silicon LSI Instead of Current Device Miniaturization

Tadahiro Ohmi,  Yukihisa Nakao,  Rihito Kuroda,  Tomoyuki Suwa,  Hiroaki Tanaka,  Shigetoshi Sugawa,  

[Date]2012/10/18
[Paper #]SDM2012-94
Fabrication process of pentacene-based vertical OFETs with HfO_2 gate insulator

Min LIAO,  Hiroshi ISHIWARA,  Shun-ichiro OHMI,  

[Date]2012/10/18
[Paper #]SDM2012-95
Effect of silicon surface roughness on MOSFET performance with ultra-thin HfON gate insulator formed by ECR sputtering

Dae-Hee Han,  Shun-ichiro Ohmi,  

[Date]2012/10/18
[Paper #]SDM2012-96
Ultra high speed wet etching technology for a silicon wafer process

Takeshi SAKAI,  Tatsuro YOSHIDA,  Kazuhiro YOSHIKAWA,  Tadahiro OHMI,  

[Date]2012/10/18
[Paper #]SDM2012-97
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[Date]2012/10/18
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[Date]2012/10/18
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[Date]2012/10/18
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[Date]2012/10/18
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