Electronics-Silicon Devices and Materials(Date:2008/10/02)

Presentation
表紙

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[Date]2008/10/2
[Paper #]
目次

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[Date]2008/10/2
[Paper #]
Evaluation of Post Cu-CMP Cleaning Chemicals for Non-Porous Ultra Low-k Dielectric Fluorocarbon Film

Xun GU,  Takenao Nemoto,  Akinobu Teramoto,  Takashi Ito,  Tadahiro Ohmi,  

[Date]2008/10/2
[Paper #]SDM2008-149
Investigation of Novel End-point Detection for Ta/Cu CMP

Xun Gu,  Takenao Nemoto,  Ara Philipossian,  Yasa Adi Sampurno,  Jiang Cheng,  Yun Zhuang,  Akinobu Teramoto,  Takashi Ito,  Tadahiro Ohmi,  

[Date]2008/10/2
[Paper #]SDM2008-150
Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol

Masayuki Numata,  Shin-Ichiro Kuroki,  Shuntaro Fujii,  Koji Kotani,  Takashi Ito,  

[Date]2008/10/2
[Paper #]SDM2008-151
Development of A Multi-Scale Simulator of Interconnect lifetime and its application to Cu lines

Hideyuki TSUBOI,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu Takaba,  Carpio Carlos A. Del,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM2008-152
Computational Study on Friction Behavior and Nanostructure of Diamond-like Carbon (DLC)

Takanori KURIAKI,  Yusuke MORITA,  Tasuku ONODERA,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. DEL,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM2008-153
Tight-Binding Quantum Chemistry Study on Excitation Properties of Perylene with Acrylic Acid on Anatase (001) Surface

Chen LV,  Kei OGIYA,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. DEL,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM2008-154
A Computational Study on Secondary Electron Emission property of Protecting Layer for Plasma Display Panels

Kazumi SERIZAWA,  Itaru YAMASHITA,  Hiroaki ONUMA,  Hiromi KIKUCHI,  Masaki KITAGAKI,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos DEL,  Momoji KUBO,  Hiroshi KAJIYAMA,  Akira MIYAMATO,  

[Date]2008/10/2
[Paper #]SDM2008-155
Development of characterization/spectroscopic simulators based on ultra-accelerated quantum chemical molecular dynamics method and its application to Si semiconductors

Akira ENDOU,  Itaru YAMASHITA,  Kazumi SERIZAWA,  Hiroaki ONUMA,  Tasuku ONODERA,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Hiromitsu TAKABA,  Caprio Carlos A. Del,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM2008-156
Electron Transport Simulation of Dye-sensitized TiO_2 Electrode based on 3D Porous Structure

Kei OGIYA,  Chen LV,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. DEL,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM2008-157
A Computational Chemistry Study on Structure and Carrier Transport Property of Light Emitting Materials

Itaru YAMASHITA,  Hiroaki ONUMA,  Kazumi SERIZAWA,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. Del,  Momoji KUBO,  Akira MIYAMATO,  

[Date]2008/10/2
[Paper #]SDM2008-158
Structure Analysis of Phosphors Materials by Experiment Integrated Computational Chemistry

Hiroaki ONUMA,  Itaru YAMASHITA,  Kazumi SERIZAWA,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. DEL,  Momoji KUBO,  Akira MIYAMATO,  

[Date]2008/10/2
[Paper #]SDM2008-159
Development of Ultra-accerelated Quantum Chemical Molecular Dynamics Method for Ferroelectric Properties of Perovskite BaTiO_3

HongJun XIAO,  Takashi HIRAI,  Ai SUZUKI,  Riadh SAHNOUN,  Michihisa KOYAMA,  Hideyuki TSUBOI,  Nozomu HATAKEYAMA,  Akira ENDOU,  Hiromitsu TAKABA,  CARPIO Carlos A. DEL,  Momoji KUBO,  Akira MIYAMOTO,  

[Date]2008/10/2
[Paper #]SDM200-160
The Application Property of B_<18>H_<22> Implantation for Millisecond Annealing

Yoji KAWASAKI,  Seiichi ENDO,  Masashi KITAZAWA,  Yoshiki MARUYAMA,  Tomohiro YAMASHITA,  Takashi KUROI,  Hidefumi YOSHIMURA,  Masahiro YONEDA,  

[Date]2008/10/2
[Paper #]SDM2008-161
A study on work function modulation in PtSi alloying with Hf

Jun GAO,  Junpei ISHIKAWA,  Shun-ichiro OHMI,  

[Date]2008/10/2
[Paper #]SDM2008-162
Statistical evaluation of characteristics variation and RTS noise of MOSFETs

Takafumi Fujisawa,  Shigetoshi Sugawa,  Shunichi Watabe,  Kenichi Abe,  Akinobu Teramoto,  Tadahiro Ohmi,  

[Date]2008/10/2
[Paper #]SDM2008-163
Impact of Fully Depleted Silicon-On-Insulator Accumulation-mode CMOS on Si(110)

Ching Foa TYE,  Weitao CHENG,  Akinobu TERAMOTO,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2008/10/2
[Paper #]SDM2008-164
Correlation between Stress Induced Leakage Current and Random Telegraph Signal noise

Yuki KUMAGAI,  Akinobu TERAMOTO,  Kenichi ABE,  Takafumi FUJISAWA,  Shunichi WATABE,  Tomoyuki SUWA,  Naoto MIYAMOTO,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2008/10/2
[Paper #]SDM2008-165
Influence of B and P dopants on SiO_2 film characteristics

Satoshi NAGASHIMA,  Hiroshi AKAHORI,  

[Date]2008/10/2
[Paper #]SDM2008-166
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