Electronics-Silicon Devices and Materials(Date:2007/03/08)

Presentation
表紙

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[Date]2007/3/8
[Paper #]
目次

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[Date]2007/3/8
[Paper #]
Ta_2O_5 Interfacial Layer between GST and W Plug enabling Low Power Operation of Phase Change Memories

Yuichi MATSUI,  Kenzo KUROTSUCHI,  Osamu TONOMURA,  Takahiro MORIKAWA,  Masaharu KINOSHITA,  Yoshihisa FUJISAKI,  Nozomu MATSUZAKI,  Satoru HANZAWA,  Motoyasu TERAO,  Norikatsu TAKAURA,  Hiroshi MORIYA,  Tomio IWASAKI,  Masahiro MONIWA,  Tsuyoshi KOGA,  

[Date]2007/3/8
[Paper #]SDM2006-254
Reset switching mechanism of ReRAM using thermal reaction model

Yoshihiro Sato,  Kentaro Kinoshita,  Aoki Masaki /,  Yoshihiro Sugiyama,  

[Date]2007/3/8
[Paper #]SDM2006-255
SiO_2/SiO_x/SiC/Si MIS Resistive Nonvolatile Memory

Yoshiyuki SUDA,  Hiromi HASEGAWA,  

[Date]2007/3/8
[Paper #]SDM2006-256
Impact of Three-Dimensional Transistor on the Pattern Area Reduction for High density ULSI

Shigeyoshi Watanabe,  Keisuke Okamoto,  Yuu Hiroshima,  Keisuke Koizumi,  Makoto Oya,  

[Date]2007/3/8
[Paper #]SDM2006-257
(111)-Oriented SrRuO_3/Pt Bottom Electrode for Reproducible Preparation of Metal Organic Chemical Vapour Deposited Pb(Zr,Ti)O_3 Films for High Density Ferroelectric Random Access Memories

Nicolas MENOU,  Hiroki KUWABARA,  Hiroshi FUNAKUBO,  

[Date]2007/3/8
[Paper #]SDM2006-258
Key technology of reliable sub micron capacitor process for high density Chain FeRAM

Koji YAMAKAWA,  Tohru OZAKI,  Hiroyukuki KANAYA,  Iwao KUNISHIMA,  Yoshinori KUMURA,  Yoshiro SHIMOJO,  Susumu SHUTO,  Osamu HIDAKA,  Yuki YAMADA,  Soichi YAMAZAKI,  Takeshi HAMAMOTO,  Shinichiro SHIRATAKE,  Daizaburo TAKASHIMA,  Tadashi MIYAKAWA,  Sumito OHTSUKI,  

[Date]2007/3/8
[Paper #]SDM2006-259
Development of Microwave-Excited Plasma-Enhanced Metal-Organic Chemical Vapor Deposition System for Formation of Ferroelectric Sr_2(Ta_<1-x>,Nb_x)_2O_7 Film on Amorphous SiO_2

Ichirou TAKAHASHI,  Kiyoshi FUNAIWA,  Keita AZUMI,  Satoru YAMASHITA,  Yasuyuki SHIRAI,  Masaki HIRAYAMA,  Akinobu TERAMOTO,  Shigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2007/3/8
[Paper #]SDM2006-260
Design method of low-power Dual-supply-voltage system LSI taking into account various leakage current of MOSFET

Shigeyoshi Watanabe,  Satoshi Hanami,  Manabu Kobayashi,  Toshitoku Takabatake,  

[Date]2007/3/8
[Paper #]SDM2006-261
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[Date]2007/3/8
[Paper #]
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[Date]2007/3/8
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