Electronics-Silicon Devices and Materials(Date:2007/01/29)

Presentation
表紙

,  

[Date]2007/1/29
[Paper #]
目次

,  

[Date]2007/1/29
[Paper #]
Current and Future SDimensional LSI Technologies

Makoto Motoyoshi,  Kazutoshi KAMIBAYASHI,  Mitsumasa KOYANAGI,  Manabu BONKOHARA,  

[Date]2007/1/29
[Paper #]SDM2006-245
32nm-node Cu Interconnect technology using density-modulated Low-k film

Munehiro TADA,  Hironori YAMAMOTO,  Fuminori ITO,  Mitsuru NARIHIRO,  Makoto UEKI,  Naoya INOUE,  Mari ABE,  Shinobu SAITO,  Tsuneo TAKEUCHI,  Naoya FURUTAKE,  Takahiro ONODERA,  Jun KAWAHARA,  Yoshiko KASAMA,  Toshiji TAIJI,  Makoto TOHARA,  Makoto SEKINE,  Yoshihiro HAYASHI,  

[Date]2007/1/29
[Paper #]SDM2006-246
Material design of porous low-k materials for 45nm node interconnects

Kei Watanabe,  

[Date]2007/1/29
[Paper #]SDM2006-247
45nmノード以降に適用可能なCu配線用PVDバリアメタル技術(配線・実装技術と関連材料技術)

,  

[Date]2007/1/29
[Paper #]SDM2006-248
A Crackless and Highly Reliable Cu Etrim Fuse using the Pinch Effect for 65nm

K. Kono,  T. Yonezu,  S. Obayashi,  M. Arakawa,  Y. Asano,  T. Uchida,  T. Iwamoto,  

[Date]2007/1/29
[Paper #]SDM2006-249
Infusion Processing for Reliable Copper Interconnects

S. Kondo,  T. Ishigami,  M. Enomoto,  T. Suzuki,  S. Sherman,  M. Tabat,  J. Hautala,  

[Date]2007/1/29
[Paper #]SDM2006-250
A Novel Resistivity Measurement Technique for Scaled-down Cu Interconnects Implemented to Reliability-focused Automobile Applications

Shinji YOKOGAWA,  Kuniko KIKUTA,  Hideaki TSUCHIYA,  Toshiyuki TAKEWAKI,  Mieko SUZUKI,  Hironori TOYOSHIMA,  Yumi KAKUHARA,  Naoyoshi KAWAHARA,  Tatsuya USAMI,  Koji OHTO,  Kunihiro FUJII,  Yasuaki TSUCHIYA,  Koji ARITA,  Koichi MOTOYAMA,  Makoto TOHARA,  Toshiji TAIJI,  Tetsuya KUROKAWA,  Makoto SEKINE,  

[Date]2007/1/29
[Paper #]SDM2006-251
Structural Evolution in LSI Devices Reducing Parasitic Effects Toward RF/ubiquitous Applications

Yoshihiro Hayashi,  

[Date]2007/1/29
[Paper #]SDM2006-252
On-Chip Differential-Transmission-Line (DTL) Interconnect for 22nm Technology

Kenichi OKADA,  Hiroyuki ITO,  Kazuya MASU,  

[Date]2007/1/29
[Paper #]SDM2006-253
複写される方へ

,  

[Date]2007/1/29
[Paper #]
Notice for Photocopying

,  

[Date]2007/1/29
[Paper #]
奥付

,  

[Date]2007/1/29
[Paper #]