Electronics-Silicon Devices and Materials(Date:2004/09/21)

Presentation
表紙

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[Date]2004/9/21
[Paper #]
目次

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[Date]2004/9/21
[Paper #]
Analyses of Surface Reaction Mechanisms of Plasma Etching by Molecular Dynamics Simulations

Satoshi HAMAGUCHI,  Hideaki YAMADA,  

[Date]2004/9/21
[Paper #]VLD2004-38,SDM2004-162
Speeding Up the Simulation of Ion Implantation with Analytic method at 3-Dimensional Process Simulator HySyProS

M. Mochizuki,  T. Uchida,  M. Takenaka,  S. Itoh,  H. Ishikawa,  M. Fujinaga,  T. Wada,  

[Date]2004/9/21
[Paper #]VLD2004-39,SDM2004-163
Effect of Discrete Dopant Distribution on MOSFET Scaling into the Future

Yoshio Aashizawa,  Hideki Oka,  

[Date]2004/9/21
[Paper #]VLD2004-40,SDM2004-164
Study on Applying High-k Materials to Ultra Thin SOI MOSFET

Toshitaka Kawamoto,  Kenji Komiya,  Yasuhisa Omura,  

[Date]2004/9/21
[Paper #]VLD2004-41,SDM2004-165
Analysis of Multi Gate MOSFET by 3D Full Band Monte Carlo Simulation

Ryo Tanabe,  Takahiro Yamasaki,  Yoshio Ashizawa,  Hideki Oka,  

[Date]2004/9/21
[Paper #]VLD2004-42,SDM2004-166
Direct Measurement of Stress Dependent Inversion Layer Mobility Using a Novel Test Structure

Takeshi OKAGAKI,  Motoaki TANIZAWA,  Tetsuya UCHIDA,  Tatsuya KUNIKIYO,  Ken'ichiro SONODA,  Motoshige IGARASHI,  Kiyoshi ISHIKAWA,  Norihiko KOTANI,  

[Date]2004/9/21
[Paper #]VLD2004-43,SDM2004-167
Gamov method applied to gate tunneling current in MOSFETs

Masateru OKAMOTO,  Hirosi TAKEDA,  Nobuya MORI,  

[Date]2004/9/21
[Paper #]VLD2004-44,SDM2004-168
Simulation of Electronic Wave Propagation in Devices Using Quantum Lattice-Gas Model

Atsushi SAKAI,  Yoshinari KAMAKURA,  Kenji TANIGUCHI,  

[Date]2004/9/21
[Paper #]VLD2004-45,SDM2004-169
Theoretical Study of Quasi-Ballistic Electron Transport from the Viewpoint of the Kinetic Equation

Nobuyuki SANO,  

[Date]2004/9/21
[Paper #]VLD2004-46,SDM2004-170
Quasi-Ballistic Quantum Transport of Nano-Scale DG-MOSFETs

Hideaki TSUCHIYA,  Motoki HORINO,  Akihiko ASANUMA,  Tanroku MIYOSHI,  

[Date]2004/9/21
[Paper #]VLD2004-47,SDM2004-171
Analysis of Electron Transport in Small n-i-n-Diode Using Molecular Dynamics/Ensemble Monte Carlo Simulator

Yoshinari KAMAKURAI,  Kenji TANIGUCHI,  

[Date]2004/9/21
[Paper #]VLD2004-48,SDM2004-172
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[Date]2004/9/21
[Paper #]
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[Date]2004/9/21
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