Electronics-Silicon Devices and Materials(Date:2002/10/22)

Presentation
表紙

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[Date]2002/10/22
[Paper #]
目次

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[Date]2002/10/22
[Paper #]
Computational Studies of Plasma Reaction Dynamics on SiO_2 Surface

Katsumi SASATA,  Toshiyuki YOKOSUKA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Tadashi SHINMURA,  Masaaki KANOH,  Akira MIYAMOTO,  

[Date]2002/10/22
[Paper #]SDM2002-196
Study of Cu-CMP Process by Accelerated Quantum Chemical Molecular Dynamics Method

Toshiyuki YOKOSUKA,  Naoyuki ISODA,  Katsumi SASATA,  Tomonori KUSAGAYA,  Ryuji MIURA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Akira MIYAMOTO,  

[Date]2002/10/22
[Paper #]SDM2002-197
Built-in Interface of High-κ Gate Stacks

Masahiko HIRATANI,  Kazuyoshi TORII,  Yasuhiro SHIMAMOTO,  Shin-ichi SAITOH,  Jiro YUGAMI,  

[Date]2002/10/22
[Paper #]SDM2002-198
Fabrication and Characterization of SBT-Based Ferroelectric Materials for Ferroelectric-Gate Transistors

Eisuke TOKUMITSU,  Masahito KISHI,  

[Date]2002/10/22
[Paper #]SDM2002-199
Theoretical Studies of Electronic Conductivity of Semiconductor Materials

Toshiyuki YOKOSUKA,  Naoyuki ISODA,  Katsumi SASATA,  Tomonori KUSAGAYA,  Ryuji MIURA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Hidehiko YABUHARA,  Nobuaki MAKINO,  Akira MIYAMOTO,  

[Date]2002/10/22
[Paper #]SDM2002-200
Band Structure Analysis of SiGe by Accelerated Quantum Chemical Molecular Dynamics Method

Toshiyuki YOKOSUKA,  Naoyuki ISODA,  Katsumi SASATA,  Tomonori KUSAGAYA,  Ryuji MIURA,  Akira ENDOU,  Momoji KUBO,  Akira IMAMURA,  Hidehiko YABUHARA,  Masaaki KANO,  Akira MIYAMOTO,  

[Date]2002/10/22
[Paper #]SDM2002-201
A New Profitable Unit-Type Mini-Fab Model for a System LSI Era

Yoshio Yamazaki,  Shigetoshi Sugawa,  Tadahiro Ohmi,  

[Date]2002/10/22
[Paper #]SDM2002-202
Present Situation and Future Direction of Collaboration Structure of Research and Development in Japanese Semiconductor Industry

Toshinori SAEKI,  

[Date]2002/10/22
[Paper #]SDM2002-203
The Changing Industrial Structure and Perspective of Semiconductor Industry in Japan

Ichiro NAKAJIMA,  

[Date]2002/10/22
[Paper #]SDM2002-204
[OTHERS]

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[Date]2002/10/22
[Paper #]