Electronics-Silicon Devices and Materials(Date:2002/06/14)

Presentation
表紙

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[Date]2002/6/14
[Paper #]
目次

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[Date]2002/6/14
[Paper #]
Effect of in-situ nitrogen incorporation for electrical characteristics of thin Al_2O_3 gate oxide

Yoshiaki TANIDA,  Yasuyuki TAMURA,  Masaomi YAMAGUCHI,  Shinji MIYAGAKI,  Chikako YOSHIDA,  Yoshihiro SUGIYAMA,  Hitoshi TANAKA,  

[Date]2002/6/14
[Paper #]SDM2002-56
Analysis of Chemical Bonding Features and determination of Energy Band profile for CVD Aluminum Oxynitride/Si(100) Heterostructures

Atsushi Suyama,  Hirokazu Yokoi,  Masahiro Narasaki,  Wataru Mizubayashi,  Hideki Murakami,  Seiichi Miyazaki,  

[Date]2002/6/14
[Paper #]SDM2002-57
Electrical Characterization of AlO_x:N Gate Dielectric Formed by Layer-by-Layer CVD

H MURAKAMI,  H YOKOI,  W MIZUBAYASHI,  H YAMASHITA,  X GAO,  S MIYAZAKI,  

[Date]2002/6/14
[Paper #]SDM2002-58
Thermal Chemical Vapor Deposition of Zirconium/Hafnium-Silicate Thin-Film Using TEOS and tert-butoxide

Seiji INUMIYA,  Dawei GAO,  Kazuhiro EGUCHI,  

[Date]2002/6/14
[Paper #]SDM2002-59
Analysis of ZrO_2/Si Interface by High-resolution RBS

Kaoru SASAKAWA,  

[Date]2002/6/14
[Paper #]SDM2002-60
Deposition technique of HfO_2 film by MOCVD using Hf[N(C_2H_5)_2]_4

K Kubo,  T takahashi,  H shinriki,  

[Date]2002/6/14
[Paper #]SDM2002-61
The Growth of ZrO_2 and The Gate Insulation Film Characteristic by Limited-Reaction Sputtering The format of Technical Report

Kentaro Kawai,  Tatsuhiro Hasu,  Kousin Monju,  Ryou Izumi,  Kimihiro Sasaki,  Tomonobu Hata,  

[Date]2002/6/14
[Paper #]SDM2002-62
Molybdenum Work Function Control by N^+ Implantation for Dual Gate CMOS Application and Its Influences

Takaaki AMADA,  Masaki HINO,  Nobuhide MAEDA,  Kentaro SHIBAHARA,  

[Date]2002/6/14
[Paper #]SDM2002-63
The Influence of Electrode on the Characteristics of (Ba,Sr)TiO_3

Hiroshi Yamada,  Takamaro Kikkawa,  

[Date]2002/6/14
[Paper #]SDM2002-64
Influence of Si substrate crystal orientation on the properties of (Ba,Sr)TiO_3

M Yamato,  H Yamada,  K Quazi,  T Kikkawa,  

[Date]2002/6/14
[Paper #]SDM2002-65
[OTHERS]

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[Date]2002/6/14
[Paper #]