Electronics-Silicon Devices and Materials(Date:2001/11/09)

Presentation
表紙

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[Date]2001/11/9
[Paper #]
目次

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[Date]2001/11/9
[Paper #]
Metal Capped Copper Interconnection Technology Using Preferential Deposition Phenomenon of W-CVD

Tatsuyuki Saito,  Toshinori Imai,  Junji Noguchi,  Maki Kubo,  Yuko Ito,  Sohei Omori,  Naofumi Ohashi,  Tsuyoshi Tamaru,  Hizuru Yamaguchi,  

[Date]2001/11/9
[Paper #]SDM2001-174
Two-step Copper Electroplating Technique using Seed Enhancement step

Nobuki HOSOI,  Ryoichi KIMIZUKA,  Mizuki NAGAI,  Shuichi OKUYAMA,  Takeshi KOBAYASHI,  Nobukazu ITO,  Koji ARITA,  Hidenobu MIYAMOTO,  

[Date]2001/11/9
[Paper #]SDM2001-175
Development of Cu CMP process with Cu abrasive free polishing technology

Naohumi Ohashi,  Youhei Yamada,  Nobuhiro Konisi,  Hiroyuki Maruyama,  Takahumi Ohshima,  Hizuru Yamaguchi,  Akira Satoh,  

[Date]2001/11/9
[Paper #]SDM2001-176
Preparation of Low Dielectric Constant a-c:F films for ULSI Intermetal Dielectrics by PECVD

N Haneji,  Y Shimogaki,  Y Nakano,  

[Date]2001/11/9
[Paper #]SDM2001-177
Low-k organic polymer deposition technique and its application with plasma polymerization method

Jun KAWAHARA,  Munehiro TADA,  Hiroto OHTAKE,  Yoshimichi HARADA,  Masayoshi TAGAMI,  Masayuki HIROI,  Keizo KINOSHITA,  Shinobu SAITO,  Takahiro ONODERA,  Naoya FURUTAKE,  Yoshihiro HAYASHI,  

[Date]2001/11/9
[Paper #]SDM2001-178
Analyses of Mechanical Strength of Low k Dielectrics

Nobuo Aoi,  Takuya FUKUDA,  Hiroshi Yanazawa,  

[Date]2001/11/9
[Paper #]SDM2001-179
Stacked Peel-off Phenomena on Cu-Damascene Process Using Low-k MSQ Dielectric

Yoshiaki SHIMOOKA,  Seiichi SATOH,  Kazuyuki HIGASHI,  Noriaki MATSUNAGA,  Hideshi MIYAJIMA,  Hideki SHIBATA,  

[Date]2001/11/9
[Paper #]SDM2001-180
Copper and CVD SiOC/SiC Integration Technology

Michio ARUGA,  Keiji HORIOKA,  Nobuo OWADA,  

[Date]2001/11/9
[Paper #]SDM2001-181
「Ghz Clock Distribution Circuit in Si ULSI」 : Comparison of distributed RC line and transmission line

Hou Wan CHAN,  Tomohito TSUSHIMA,  Yoshiato YOKOYAMA,  Kazuya MASU,  

[Date]2001/11/9
[Paper #]SDM2001-182
[OTHERS]

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[Date]2001/11/9
[Paper #]