Electronics-Silicon Devices and Materials(Date:2001/10/09)

Presentation
表紙

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[Date]2001/10/9
[Paper #]
目次

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[Date]2001/10/9
[Paper #]
New Manufacturing Technology Concept in the 300mm Era

Atsuyoshi KOIKE,  

[Date]2001/10/9
[Paper #]SDM2001-159
Influence of Organic Contamination on Electrical Property of Gate Oxides

Masao INOUE,  Kanji TAKAHASHI,  Akinobu TERAMOTO,  Yasuhiko HORIE,  Tatsunori KANEOKA,  Yoshikazu OHNO,  Eiji HARA,  Junji KOBAYASHI,  

[Date]2001/10/9
[Paper #]SDM2001-160
Development of MIM/Ta_2O_5 capacitor process for 0.10μm-DRAM

Isamu ASANO,  Yoshitaka NAKAMURA,  Masahiko HIRATANI,  Toshihide NABATAME,  Shinpei IIJIMA,  Tomonori SAEKI,  Takuya FUTASE,  Satoshi YAMAMOTO,  Tatsuyuki SAITO,  Toshihiro SEKIGUCHI,  

[Date]2001/10/9
[Paper #]SDM2001-161
Growth and Doping Mechanism in Si Gas-Source MBE In-situ Doped with Phosphorus

Maki SUEMITSU,  Yoshikazu TSUKIDATE,  

[Date]2001/10/9
[Paper #]SDM2001-162
Adsorption of Organic Contaminants on Si-Wafer Surface under Vacuum

Teruyuki HAYASHI,  Kaname SUZUKI,  Misako SAITO,  Sigetoshi SUGAWA,  Tadahiro OHMI,  

[Date]2001/10/9
[Paper #]SDM2001-163
Adhesion Behavior of Trace Impurities Remain in Ultrapure Water to Silicon Wafer Surface

Masahiko KOGURE,  Takahiro YONEHARA,  Toshihisa SAKURAI,  Tadahiro OHMI,  

[Date]2001/10/9
[Paper #]SDM2001-164
Theoretical Study of Silicon Wafer Pollution

Toshiyuki YOKOSUKA,  Hideyuki SETA,  Seiichi TAKAMI,  Momoji KUBO,  Akira MIYAMOTO,  Takeshi TAKATSUKA,  

[Date]2001/10/9
[Paper #]SDM2001-165
Photoresist developer reclamation technology from spent developer using an electrodialysis method

Hiroshi Sugawara,  Yoshinori Tajima,  Tadahiro Ohmi,  

[Date]2001/10/9
[Paper #]SDM2001-166
Photo Resist Stripping Using Oxidant Controlled SOM

Hiroshi TOMITA,  Motoyuki SATO,  Soichi NADAHARA,  Takayuki SAITOH,  Tomonori KOJIMARU,  Yusuke MURAOKA,  

[Date]2001/10/9
[Paper #]SDM2001-167
A Study of the Etchant for FPD Glass Substrate

Tatsuhiro Yabune,  Toshihisa Sakurai,  Tadahiro Ohmi,  Keiichi Nii,  Kanenori Itoh,  Hirohisa Kikuyama,  

[Date]2001/10/9
[Paper #]SDM2001-168
Theoretical Study of CMP Processes

Toshiyyuki YOKOSUKA,  Katsumi SASATA,  Hitoshi KUROKAWA,  Seiichi TAKAMI,  Momoji KUBO,  Akira MIYAMOTO,  Akira IMAMURA,  

[Date]2001/10/9
[Paper #]SDM2001-169
Development of Accelerated Quantum Chemical Calculation Program and Its Application to Silicon-based Materials

Seiichi TAKAMI,  Toshiyuki YOKOSUKA,  Hitoshi KUROKAWA,  Tomonori KUSAGAYA,  Ken SUZUKI,  Momoji KUBO,  Akira MIYAMORO,  Akira IMAMURA,  

[Date]2001/10/9
[Paper #]SDM2001-170
Accelerated Quantum Molecular Dynamics Studies on Silicon Plasma Oxidation Process

Hitoshi KUROKAWA,  Katsumi SASATA,  Toshiyuki YOKOSUKA,  Ken SUZUKI,  Seiichi TAKAMI,  Momoji KUBO,  Akira MIYAMOTO,  Akira IMAMURA,  

[Date]2001/10/9
[Paper #]SDM2001-171
The Analysis of Chlorine Plasma Etching Processes by Accelerated Quantum Chemical Molecular Dynamics

Katsumi SASATA,  Toshiyuki YOKOSUKA,  Hitoshi KUROKAWA,  Seiichi TAKAMI,  Momoji KUBO,  Akira MIYAMOTO,  Akira IMAMURA,  

[Date]2001/10/9
[Paper #]SDM2001-172
Crystal Growth Simulation on Electronics Materials

Momoji Kubo,  Toshiyuki Yokosuka,  Hitosi Kurokawa,  Tomonori Kusagaya,  Ken Suzuki,  Seiichi Takami,  Akira Miyamoto,  Akira Imamura,  

[Date]2001/10/9
[Paper #]SDM2001-173
[OTHERS]

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[Date]2001/10/9
[Paper #]