Electronics-Silicon Devices and Materials(Date:2000/12/14)

Presentation
表紙

,  

[Date]2000/12/14
[Paper #]
目次

,  

[Date]2000/12/14
[Paper #]
Improvement and Applications of Gas Cluster Ion Beam

Hiromichi KINPARA,  Toshio SEKI,  Jiro MATSUO,  Gikan TAKAOKA,  

[Date]2000/12/14
[Paper #]SDM2000-167
The TEM sample preparation method for quick turn around time on TEM evaluation

Masaaki Furuta,  Naoto Hashikawa,  Yukinori Hirose,  Kouji Fukumoto,  Youji Mashiko,  

[Date]2000/12/14
[Paper #]SDM2000-168
Influence of annealing on carrier profiles near the buried oxide interface of bonded SOI wafers

Shinya Ito,  Hideo Uchida,  Masaya Ichimura,  Eisuke Arai,  

[Date]2000/12/14
[Paper #]SDM2000-169
Molecular Dynamics Simulation of Fluorine Ion Etching of Silicon

Shun-ichi CHIBA,  Takaaki AOKI,  Jiro MATSUO,  Gikan TAKAOKA,  

[Date]2000/12/14
[Paper #]SDM2000-170
Distribution of Defects in Diborane and Hydrogen Implanted Silicon Prepared by Ion Shower Implantation

K. Naga,  K. Yokota,  K. Nakamura,  M. Tanjou,  K. Matsuda,  H. Takano,  

[Date]2000/12/14
[Paper #]SDM2000-171
Epitaxial Growth of SiGeC Alloyed Crystals Using UHV-CVD

T. Saitoh,  Y. Kanazawa,  K. Yuki,  K. Toyoda,  A. Asai,  T. Takagi,  M. Kubo,  

[Date]2000/12/14
[Paper #]SDM2000-172
Observation of Ge segregation and Si-Ge intermixing by CAICISS

Takashi Tokuda,  Yasunori Hattori,  Motoki Okinaka,  Jun Ohta,  Masahiro Nunoshita,  

[Date]2000/12/14
[Paper #]SDM2000-173
Study of Direct Tunneling of Very Thin SiO_2 Film

Y. TAKAMI,  Y. KITAGAWA,  N. MATSUO,  

[Date]2000/12/14
[Paper #]SDM2000-174
Impacts of residual chlorine in CVD-TiN gate electrode on the gate oxide reliability

Masaru Moriwaki,  Takayuki Yamada,  

[Date]2000/12/14
[Paper #]SDM2000-175
Properties of MOD-Bi_2SiO_5 Thin Films at Low Temperatures

Masaki Yamaguchi,  Takao Nagatomo,  Yoichiro Masuda,  

[Date]2000/12/14
[Paper #]SDM2000-176
Preparation of PTFE Low-k Thin Film Deposited by Soft X-ray Ablation

N. Kohma,  O. Maida,  M. Okumoto,  M. Ueno,  S. Kitai,  T. Kanashima,  M. Okuyama,  H. Ohashi,  

[Date]2000/12/14
[Paper #]SDM2000-177
Preparation and Characterization of High-k ZrO_2 Thin Film Deposited by Pulsed Laser Deposition

M. Ueno,  O. Maida,  S. Kitai,  T. Kanashima,  M. Okuyama,  

[Date]2000/12/14
[Paper #]SDM2000-178
Characterization of High Dielectric Constant ZrO_2 and SrZrO_3 Thin Films Prepared by Sol-gel Method

K. Osima,  E. Tokumitsu,  

[Date]2000/12/14
[Paper #]SDM2000-179
Low-Temp.Poly-Si TFT driven Light-Emitting Polymer Display

Mutsumi Kimura,  Ryoichi Nozawa,  Hiroshi Maeda,  Yojiro Matsueda,  Satoshi Inoue,  Satoru Miyashita,  Tatsuya Shimoda,  

[Date]2000/12/14
[Paper #]SDM2000-180
Mechanism of Device Degradation due to Dynamic Stress in Poly-Si TFTs

Yoshiaki Toyota,  Takeo Shiba,  Makoto Ohkura,  

[Date]2000/12/14
[Paper #]SDM2000-181
Study of Transition Stage of Crystal Growth for the Poly-Si Prepared by Excimer Laser Annealing Method

Naoya KAWAMOTO,  Hisashi ABE,  Ryouhei TAGUCHI,  Naoto MATSUO,  Tomoyuki NOUDA,  Hiroki HAMADA,  

[Date]2000/12/14
[Paper #]SDM2000-182
Hot Carrier Effect in Low Temperature Poly-Si TFTs

K. Katoh,  Y. Uraoka,  T. Hatayama,  Kawamura T. /,  Y. Tutihasi,  

[Date]2000/12/14
[Paper #]SDM2000-183
Local concentration of a lifetime killer in multicrystalline silicon solar cells

K. Kurobe,  M. Miura,  H. Matsunami,  

[Date]2000/12/14
[Paper #]SDM2000-184
12>> 1-20hit(23hit)