Electronics-Silicon Devices and Materials(Date:2000/10/13)

Presentation
表紙

,  

[Date]2000/10/13
[Paper #]
目次

,  

[Date]2000/10/13
[Paper #]
高効率半導体生産ラインを実現する高性能バックポンプの開発

,  

[Date]2000/10/13
[Paper #]SDM2000-148
Fluorine Passivation Technology on metal surface

Hiroto Izumi,  Yoshihiro Kikunaga,  Masatsugu Kawawaki,  Hirohisa Kikuyama,  Toshihisa Sakurai,  Tadahiro Ohmi,  

[Date]2000/10/13
[Paper #]SDM2000-149
A Study of the qualities of silicon oxide film formed and CVD silicon oxide film irradiated by high-density Kr/O_2 mixed plasma at low temperature

Jun Takano,  Yuji Saito,  Toshihisa Sakurai,  Tadahiro Ohmi,  Tatsuhiro Yabune,  

[Date]2000/10/13
[Paper #]SDM2000-150
Adsorption of SIH_4 on Si(100)

Masanori Shinohara,  Akio Seyama,  Nozomu Kamakura,  Yasuo Kimura,  Michio Niwano,  

[Date]2000/10/13
[Paper #]SDM2000-151
Silane adsorption processes on SiGe surfaces

Nozomu Kamakura,  Akio Seyama,  Masanori Shinohara,  Yasuo Kimura,  Michio Niwano,  

[Date]2000/10/13
[Paper #]SDM2000-152
Effect of pre-cleaning of SiGe selective epitaxial growth on HBT characteristics

Y. Kiyota,  K. Oda,  E. Ohue,  R. Hayami,  M. Kondo,  K. Washio,  M. Tanabe,  H. Shimamoto,  O. Yamaguchi,  T. Inada,  

[Date]2000/10/13
[Paper #]SDM2000-153
Mechanism of Oxide Formation on Si Surfaces in Fluorine-Based Solution and the Effect of Residual Oxide on Silicidation Process

Yoshihiro Sugita,  

[Date]2000/10/13
[Paper #]SDM2000-154
Suppression of Inverse Narrow Channel Effects by Novel Shallow Trench Isolation Fabrication Process with Rapid Thermal Oxidation for Liner and Gate Oxide Formation

K. Shiozawa,  K. Horita,  Y. Itoh,  H. Umeda,  T. Uchida,  K. Goto,  T. Kuroi,  Y. Tokuda,  Y. Inoue,  S. Satoh,  M. Inuishi,  

[Date]2000/10/13
[Paper #]SDM2000-155
Electromigration Performance of Damascene Interconnects with Cu/Ti/TiN/Ti Layered Structure

Kazuhide Abe,  Syunichi Tokitoh,  Hiroshi Onoda,  

[Date]2000/10/13
[Paper #]SDM2000-156
High-Efficiency Silicon CMOS Power Amplifier for GHz-band Digital Cellular System

M. Yokoyama,  R. Tachibana,  K. Tsubouchi,  

[Date]2000/10/13
[Paper #]SDM2000-157
[OTHERS]

,  

[Date]2000/10/13
[Paper #]