IEICE Technical Committee

Electronics-Silicon Devices and Materials(Date:1999/07/22)

Presentation

表紙

[Date]1999/7/22
[Paper #]

CONTENTS

[Date]1999/7/22
[Paper #]

A 0.1μm CMOS Technology using W/WN_x/Polysilicon Dual Gate Electrode for 4G DRAM and Beyond

Jun-Oh Choi, Sung-Keun Chang, Sang-Hee Lee, Seon-Soon Kim, Yong-Hae Kim, Dae-Hee Hahn, Hyung-Duck Kim,

[Date]1999/7/22
[Paper #]SDM99-55

Thermal Oxidation Characteristics of Oxide Grown on Si Exposed to Nitrogen Plasma and its Reliability

Akihiro Ikeda, Chika Fujiki, Kenichi Takagi, Yukinori Kuroki,

[Date]1999/7/22
[Paper #]SDM99-56

Fabrication and Characterization of a Quantum Dot Flash Memory

Taekeun Hwang, Sangyeon Han, Hyun-ju Lee, Hyungcheol Shin,

[Date]1999/7/22
[Paper #]SDM99-57

Ultra-Low Energy Ion Implant Profile Prediction for sub 0.1μm Technologies

Jeong-Won KANG, Young-Ghik Lee, Ki-Ryang Byun, Jea-Hoon Choi, Oh-Keun Kwon, Ho-Jung Hwang,

[Date]1999/7/22
[Paper #]SDM99-58

Low temperature epitaxy of Si by remote plasma process

A. Yoshida, A. Wakahara, K. Utsumi, In-Ho Bae,

[Date]1999/7/22
[Paper #]SDM99-59

Hybrid Simulation for IP-Based Design

Young-ran Ma, Kiyoung Choi,

[Date]1999/7/22
[Paper #]SDM99-60

A Hardware Cost Estimation Method For Design Reuse

Wonjong Kim, Hyunchul Shin,

[Date]1999/7/22
[Paper #]SDM99-61

A Reconfigurable Digital Signal Processor

B.K. Tan, R. Yoshimura, K. Taniguchi,

[Date]1999/7/22
[Paper #]SDM99-62

FatBaby: Multi-functional Rapid Prototyper for IP-based System Designs

Minhee Ahn, Jungsoo Lee, Namdo Kim, Saeyang Yang,

[Date]1999/7/22
[Paper #]SDM99-63

Reuse Design of Run Length Coder using VHDL

Seongmo Park, Seongmin Kim, Inhag Park, Jinjong Cha, Hanjin Cho,

[Date]1999/7/22
[Paper #]SDM99-64

A Real-Time MP3 encoder design with ARM IP

Sung-Chul Lee, Kyoung-Youn Cho,

[Date]1999/7/22
[Paper #]SDM99-65

IP Interface Design Experiences with an On-Chip Bus

Kyoung-Son Jhang, Joo-Byung Joo, Nak-Woong Eum, Inhag Park,

[Date]1999/7/22
[Paper #]SDM99-66

Optical Lithography for Sub-100nm Technology

Ki-Ho Baik,

[Date]1999/7/22
[Paper #]SDM99-67

40nm Electron Beam Patterning by Optimization of Digitizing Method and Post Exposure Bake and its Application to Silicon Nano-Fabrication

Sangyeon Han, Taejun Park, Bonkee Kim, Hyungcheol Shin, Kwyro Lee,

[Date]1999/7/22
[Paper #]SDM99-68

Low temperature formation of gate-grade silicon nitride film employing microwave-excitation high-density plasma

Yuji Saito, Katsuyuki Sekine, Masaki Hirayama, Tadahiro Ohmi,

[Date]1999/7/22
[Paper #]SDM99-69

Control of Boron Lateral Diffusion by Nitrogen Implantation in Sub-0.15mm CMOS Devices

S.-K. Hong, J.-H. Choi, S.-G. Lee, C.-Y. Kang, J.-H. Son, J.-G. Ahn, J.-M. Hwang,

[Date]1999/7/22
[Paper #]SDM99-70

Plasma-Induced Dopant (As, P, Sb, B) Deactivation by Low-Energy Ion Bombardment (<30eV) during Silicon Epitaxial Growth

Hajime Kumami, Wataru Shindo, Satoshi Hondo, Tadahiro Ohmi,

[Date]1999/7/22
[Paper #]SDM99-71

Uniform and Thermally Stable Co Salicide Formation for Sub-Quarter-micron Dual-Gate CMOS Devices

Hirofumi Sumi, Jun Suenaga, Yutaka Okamoto,

[Date]1999/7/22
[Paper #]SDM99-72