Electronics-Silicon Devices and Materials(Date:1999/05/20)

Presentation
表紙

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[Date]1999/5/20
[Paper #]
目次

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[Date]1999/5/20
[Paper #]
Characteristics of Nb_2O_5 film for optical wave gide by Electron-Beam-Excited Plasma

Ren Suzuki,  Takanori Kubota,  Taishi Mutuga,  Shinken Koh,  Toshitaro Yoshioka,  Keisuke Kida,  Kiyohide Baba,  Shunjiro Ikezawa,  Akira Nishiwaki,  

[Date]1999/5/20
[Paper #]SDM99-1
Application of TiO_2 film with optical catalyst to environment by Electron-Beam-Excited Plasma

Takanori Kubota,  Ren Suzuki,  Taishi Mutuga,  Shinken Koh,  Toshitaro Yoshioka,  Keisuke Kida,  Kiyohide Baba,  Akira Nishiwaki,  Shunjiro Ikezawa,  Yoshihiko Ninomiya,  

[Date]1999/5/20
[Paper #]SDM99-2
Carrier profiles in bonded SOI wafers obtained by the spreading-resistance measurerment

M. ICHIMURA,  T. OHASHI,  E. ARAI,  

[Date]1999/5/20
[Paper #]SDM99-3
Effects of Inhomogeneous Carrier Depth Profiles on Deep-Level Transient Spectroscopy Measurernents

A. Ito,  Y. Tokuda,  

[Date]1999/5/20
[Paper #]SDM99-4
Identification of MOS Oxide Defect Location With A Spatial Resolution Less Than 0.1μm Using Photoemission Microscope

Takashi Ohzone,  Masae Yuzaki,  Toshihiro Matsuda,  Etsumasa Kameda,  

[Date]1999/5/20
[Paper #]SDM99-5
Thin-film SOI Power MOSFETs

Satoshi Matsumoto,  Yasushi Hiraoka,  Toshiaki Yachi,  

[Date]1999/5/20
[Paper #]SDM99-6
Development of High Efficiency Silicon RF - Power MOSFET

Y. Kusakari,  Masatoshi M,  T. Fujioka,  K. Katsueda,  Y. Matsunaga,  I. Kohjiro,  K. Onozawa,  T. Sato,  I. Yoshida,  

[Date]1999/5/20
[Paper #]SDM99-7
Buried growth of Si on SiO_2 stripe patterned substrate by ECR plasma CVD

Yukio Yoshida,  Yukihiro Takahashi,  Kimihiro Sasaki,  

[Date]1999/5/20
[Paper #]SDM99-8
Heavily Boron-Doped Silicon Crystal Growth

T. Taishi,  T. Fukami,  X. Huang,  Keigo Hoshikawa,  M. Kubota,  T. Kajigaya,  

[Date]1999/5/20
[Paper #]SDM99-9
「Invited Paper」 High Frequency Wide-Bandgap Semiconductor Devices

H. Masato,  Y. Ikeda,  T. Matsuno,  K. Nishii,  K. Inoue,  D. Ueda,  

[Date]1999/5/20
[Paper #]SDM99-10
Composition control of SiC thin films deposition using HMDS

T. Muramatsu,  Y. Xu,  T. Aoki,  Y. Hatanaka,  

[Date]1999/5/20
[Paper #]SDM99-11
Effect of impurity in CuInSe_2 by ion implantation

T. Tanaka,  A. Wakahara,  T. Ohshima,  H. Itoh,  S. Okada,  A. Yoshida,  

[Date]1999/5/20
[Paper #]SDM99-12
ZnO thin film prepared by laser ablation

Yoshihito Hiroe,  Akihiro Wakahara,  Akira Yoshida,  

[Date]1999/5/20
[Paper #]SDM99-13
[OTHERS]

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[Date]1999/5/20
[Paper #]