Electronics-Silicon Devices and Materials(Date:1998/08/21)

Presentation
表紙

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[Date]1998/8/21
[Paper #]
目次

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[Date]1998/8/21
[Paper #]
The Study to Predict the In-Service Life of Dry Vaccum Pumps based on the Signal Model of Stochastic Process

Satoshi KONISHI,  Arihiro ISHIDA,  Toshirou SATOH,  Kiyohito YAMASAWA,  

[Date]1998/8/21
[Paper #]SDM98-123
Influence of Organic Contamination on Ultra Thin Gate Oxide Film

Takeshi Ohkawa,  Osamu Nakamura,  Tadahiro Ohmi,  

[Date]1998/8/21
[Paper #]SDM98-124
Low-Temperature (300℃) Polycrystalline Silicon Deposition by Microwave-Excited High-Density Plasma

W Shindo,  S. Sakai,  T. Ohmi,  

[Date]1998/8/21
[Paper #]SDM98-125
Ultra-shallow/low-leakage p^+ junction formation by BF_2^+-ion-implantation and following low-temperature annealing

Kei Kanemoto,  Akira Nakada,  Mauricio Masazumi Oka,  Yukio Tamai,  Tadahiro Ohmi,  

[Date]1998/8/21
[Paper #]SDM98-126
Self-align formation of barrier layer for Fully Self-Aligned Metalization MOSFET

Chang-Hun Lee,  Takamasa Nishimura,  Hideki Matsuhashi,  Kazuya Masu,  Kazuo Tsubouchi,  

[Date]1998/8/21
[Paper #]SDM98-127
ELTRAN^【○!R】 ; SOI-Epi wafers

Takao Yonehara,  

[Date]1998/8/21
[Paper #]SDM98-128
Low-Resisitivity bcc-Ta Gate FDSOI MOS Technology

Ichiro Ohshima,  Kazuhide Ino,  Takeo Ushiki,  Kunihiro Kawai,  Tadahiro Ohmi,  

[Date]1998/8/21
[Paper #]SDM98-129
Miniaturized MOSFET with Fully-Self-Aligned Metallization for GHz-band Power Amplifier

M Yokoyama,  A. Morimoto,  T. Saito,  K. Masu,  K. Tsubouchi,  

[Date]1998/8/21
[Paper #]SDM98-130
Particle Removal by M jet scrubber

Itaru Kanno,  Norikazu Nakatani,  Yoshio Hayashide,  

[Date]1998/8/21
[Paper #]SDM98-131
Cleaning of Contact hole Bottoms employing Hydrogen and Water Vapor Plasma Downstream added NF_3

Kenji Ishikawa,  Miki Suzuki,  Touru Tanahashi,  Kousuke Suzuki,  Shigeru Okamura,  

[Date]1998/8/21
[Paper #]SDM98-132
Advanced Wet Clean-up process for ULSI Fabrication : Particle Free Single Wafer cleaning system

Toshihito Tsuga,  Takahisa Nitta,  Masahiro Miki,  Yasuyuki Harada,  Tadahiro Ohmi,  

[Date]1998/8/21
[Paper #]SDM98-133
[OTHERS]

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[Date]1998/8/21
[Paper #]